Rotary fixture for vapor deposition coating apparatus
AssigneeUnion Carbide Chemicals & Plastics Technology Corporation
InventorRoger A. Olson
Life of this patent
Estimating the term…
Abstract
Apparatus are disclosed for coating the inside surfaces of hollow objects with a coating material by vapor deposition wherein the objects are removably attached to a rotary fixture which is employed for holding the objects while the coating process is being conducted. The rotary fixture comprises a hollow chamber rotatably mounted about an axis of rotation wherein the chamber can have a plurality of connecting union assemblies which secure the objects and provide communication between the inside surfaces of the objects and the inside space of the hollow chamber. The coating material is introduced from the interior space of the hollow chamber to the interior space of the objects under vacuum conditions.
Claims14
A rotary fixture for coating the inside surfaces of hollow objects with a coating material by vapor deposition, comprising:
- (i) a hollow chamber rotatably mounted about an axis of rotation, said chamber having a top wall, a bottom wall and an interior space;
- (ii) a first vapor transfer port concentrically disposed about the axis of rotation through the top wall and in communication with the interior space of the chamber;
- (iii) a second vapor transfer port concentrically disposed about the axis of rotation through the bottom wall and in communication with the interior space of the chamber;
- and
- (iv) at least one connecting union assembly comprising;
- (a) a hollow connecting member having a first end attached to the top wall of the chamber and in communication with the interior space of the chamber, and a second end;
- and
- (b) a valve means in communication with the second end.
An apparatus for coating the inside surfaces of hollow objects with parylene by vapor deposition under vacuum conditions comprising:
- (A) a rotary fixture comprising:
- (i) a hollow chamber rotatably mounted about an axis of rotation, said chamber having a top wall, a bottom wall and an interior space;
- (ii) a first vapor transfer port concentrically disposed about the axis of rotation through the top wall and in communication with the interior space of the chamber;
- (iii) a second vapor transfer port concentrically disposed about the axis of rotation through the bottom wall and in communication with the interior space of the chamber;
- and
- (iv) at least one connecting union assembly comprising;
- (a) a hollow member having a first end attached to the top wall of the chamber and in communication with the interior space of the chamber, and a second end;
- and
- (b) a valve means in communication with the second end;
- (B) a vaporization zone to which parylene dimer can be introduced;
- (C) a pyrolysis zone connected having an entrance end in communication with the vaporization zone and an exit end in communication with the first vapor transfer port of the rotary fixture;
- and
- (D) a vacuum means having a suction end and a discharge end, said suction end being in communication with the second vapor transfer port of the rotary fixture.
Dependencies are inferred from the claim text.