Coating apparatus

A coating apparatus comprising:

• rotating and holding means for holding and rotating an object to be coated;
• and
• a container which encloses said rotating and holding means and prevents dispersion of coating liquid supplied to an object to be coated;
• said rotating and holding means being provided with a washing liquid guide portion, a supply nozzle, for supplying washing liquid for washing off coating liquid which has attached to said container, provided adjacently and facing said washing liquid guide portion, whereby washing liquid discharged from said supply nozzle is dispersed inside said container via said washing liquid guide portion of said rotating and holding means.

A coating apparatus comprising:

• rotating and holding means for holding and rotating an object to be coated;
• and
• a container which encloses said rotating and holding means and prevents dispersion of coating liquid supplied to an object to be coated;
• said rotating and holding means being provided with a pool portion which pools washing liquid for washing off coating liquid which has attached to said container, and discharge holes for discharging washing liquid from said pool portion in a direction of inside walls of said container due to rotation of said rotating and holding means.

A coating apparatus comprising:

• rotating and holding means for holding and rotating an object to be processed;
• a container which encloses said rotating and holding means and prevents dispersion of coating liquid supplied to an object to be processed;
• a washing liquid discharge nozzle which discharges washing liquid in a direction of a rear surface of an object to be processed as such object is held by said holding and rotating means;
• and
• control means for gradually changing a rotational speed for said rotating and holding means when a rear surface of an object to be processed is to be washed, whereby washing liquid which has struck a rear surface of such object is dispersed in a direction of a wall surface of said container.

A coating apparatus comprising:

• rotating and holding means for holding and rotating an object to be processed;
• a first container which encloses said rotating and holding means and prevents dispersion of coating liquid supplied to such object to be processed;
• a second container located coaxially in said first container and underneath said rotating and holding means;
• a first washing liquid discharge nozzle provided so as to lead, to the entire surface of said first container, washing liquid discharged in a direction of such object;
• and
• a second washing liquid discharge nozzle provided so as to lead, to the entire surface of said second container, washing liquid discharged in a direction of such object.