Polycrystalline silicon rod for floating zone method and process for making the same
AssigneeShin-Etsu Handotai Co., Ltd.
InventorsYasuhiro Ikeda, Kyoji Oguro
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Abstract
A polycrystalline silicon rod for preparing a monocrystalline silicon rod by a floating zone method, wherein at least a central portion of the section of the polycrystalline silicon rod has coarsened silicon monocrystalline grains around the center over an area of or above the minimum section of a molten zone during progress in the floating zone method and the outer peripheral portion of the coarsened region has fine monocrystalline grains. From the polycrystalline silicon rod, the monocrystalline silicon rod for a semiconductor is prepared with a high yield by the single floating zone method.
Claims4
A polycrystalline silicon rod for preparing a monocrystalline silicon rod for a semiconductor by a floating zone method wherein the monocrystalline silicon rod is prepared by a single passage of the floating molten zone through said polycrystalline silicon rod, said polycrystalline silicon rod comprising:
- (a) a monocrystalline silicon rod portion having a longitudinal axis in the <100>
- direction at the center of the radial section of the polycrystalline silicon rod, and a polycrystalline silicon portion formed around said monocrystalline silicon rod portion by a chemical vapor growth method;
- and
- (b) a first region of the sectional area of said polycrystalline silicon portion which is formed of coarsened silicon monocrystal grains surrounding said monocrystalline silicon rod portion and a second region of said sectional area which is formed of fine silicon micro-monocrystal grains surrounding said first region of said polycrystalline silicon portion and said first region and the monocrystalline silicon rod portion combined having a sectional area larger than the minimum sectional area of the floating molten zone.
Dependencies are inferred from the claim text.