Scanning probe microscope using stored data for vertical probe positioning

A method for producing an interaction, other than a measurement of topography, between a probe and the surface of a sample, including the following steps,

• providing a first scan of the probe relative to the surface of the sample at a plurality of positions in the X and Y plane,
• controlling the probe during the first scan at the plurality of positions in a Z direction vertical to the surface to measure the topography of the surface and to produce data representative of the topography at the plurality of positions,
• storing the data representative of the topography of the surface at the plurality of positions,
• providing a second scan of the probe relative to the surface of the sample and controlling the Z direction of the probe at the plurality of positions in accordance with the stored data representative of the topography at the plurality of positions, and
• producing an interaction at the plurality of positions, other than the measurement of topography, between the probe and the surface of the sample during the second scan.

Interactive apparatus including a scanning probe microscope having a probe positioned relative to a sample surface and having relative motion between the probe and the sample surface in the X and Y plane and controlled and sensed in the Z direction vertical to the surface to produce data responsive to the topography of the surface, including:

• means for providing a first scan by the probe of the sample surface in the X and Y plane and controlling and sensing in the Z direction vertical to the surface to produce data representative of the topography of the surface,
• means for storing the data representative of the topography of the surface,
• means for providing at least a second scan by the probe of the sample surface in response to the stored data to control the probe in the X, Y and Z directions in accordance with the stored data, and
• means for measuring a parameter of the surface other than topography or performing a task related to topography by the probe during the at least second scan.

An apparatus for producing an interaction, other than a measurement of topography, between a probe and the surface of a sample, including:

• means for providing a first scan of the probe relative to the surface of the sample at a plurality of positions in the X and Y plane,
• means for controlling the probe during the first scan at the plurality of positions in a Z direction vertical to the surface to measure the topography of the surface and to produce data representative of the topography at the plurality of positions,
• means for storing the data representative of the topography of the surface at the plurality of positions,
• means for providing a second scan of the probe relative to the surface of the sample and controlling the Z direction of the probe at the plurality of positions in accordance with the stored data representative of the topography at the plurality of positions, and
• means for producing an interaction at the plurality of positions other than the measurement of topography, between the probe and the surface of the sample during the second scan.