Room temperature wafer cleaning process
AssigneeUnited Microelectronics Corp.
InventorChao-Yang Chen
Life of this patent
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Abstract
A new method of removing particles from the surface of a wafer is described. The key to the method is a room temperature ammonium hydroxide-hydrogen peroxide solution. The wafer is immersed in hydrofluoric acid, then, while the wafer is still wet, it is either immersed in an ammonium hydroxide-hydrogen peroxide solution or the ammonium hydroxide-hydrogen peroxide solution is sprayed onto the wafer. Since the cleaning solution is at room temperature, the process is safer. The bath life is prolonged because the solution does not break down as it would at higher temperatures.
Claims20
The method of removing surface particles from a wafer comprising:
- immersing said wafer in a hydrofluoric acid solution;
- while said wafer is still wet, removing surface particles from said wafer using an ammonium hydroxide-hydrogen peroxide solution at room temperature;
- performing a quick dump rinse and spin dry on said wafer to complete said particle removal process.
The method of claim I wherein said removing surface particles is done by immersion in said ammonium hydroxide-hydrogen peroxide solution at room temperature for a duration of about 10 minutes.
The method of removing surface particles from a wafer comprising:
- immersing said wafer in a hydrofluoric acid solution;
- while said wafer is still wet, immersing said wafer in an ammonium hydroxide-hydrogen peroxide solution at room temperature without bubbling said solution;
- and
- performing a quick dump rinse and spin dry on said wafer to complete said particle removal process.
The method of claim e wherein said ammonium hydroxide-hydrogen peroxide solution is ammonium hydroxide (1):hydrogen peroxide (1):water (5).
The method of removing surface particles from a wafer comprising:
- immersing said wafer in a hydrofluoric acid solution;
- inserting said wafer into a combined clean and quick dump rinse tank equipped with top and bottom spray nozzles and a drain while said wafer is still wet;
- filling said tank with ammonium hydroxide-hydrogen hydrogen peroxide solution and bubbling with nitrogen gas and said ammonium hydroxide - hydrogen peroxide solution;
- providing powerful spray and bubbling of ammonium hydroxide-hydrogen peroxide and bubbling with nitrogen gas in said tank for great agitation;
- draining said solution from said tank while said spray is still provided;
- closing said drain and repeating said great agitation and draining steps;
- and
- performing a quick dump rinse and spin dry on said wafer to complete said particle removal process.
Dependencies are inferred from the claim text.