Mask alignment system for components with extremely sensitive surfaces

An apparatus for contact masking a substrate comprising:

• first means for holding a substrate, wherein said first means includes a deformable disk, wherein said deformable disk has a cutout having the same shape as the substrate;
• a contact mask
• means for holding said contact mask;
• separating means for keeping said substrate and said contact mask apart during optical alignment;
• aligning means for optically aligning said substrate and said contact mask, said aligning means aligning through apertures in the contact mask to alignment features disposed on said substrate;
• and
• second means for brining said substrate and said contact mask in contact once aligned and locking means for holding together the first means and means for holding a contact mask in superposed, aligned relation as a fixture, whereby the fixture can be transported for processing of the substrate.

An apparatus for contact masking a substrate comprising:

• first means for holding a substrate, wherein said first means includes a deformable disk, wherein said deformable dick includes a receptacle for securing the substrate;
• a contact mask;
• means for holding said contact mask;
• separating means for keeping said substrate and said contact mask apart during optical alignment;
• aligning means for optically aligning said substrate and said contact mask, said aligning means aligning through apertures in the contact mask to alignment features disposed on said substrate;
• and
• second means for bringing said substrate and said contact mask in contact once aligned and locking means for holding together the first means and means for holding a contact mask in superposed, aligned relation as a fixture, whereby the fixture can be transported for processing of the substrate.

Apparatus for contact masking an object comprising:

• a) a first transportable means including a deformable member and a disk connected together to hold an object,
• b) means including a transportable cover for supporting a contact mask,
• c) aligning means for optically aligning said object and said contact mask, said aligning means aligning through apertures in the contact mask to alignment features disposed on said object,
• d) vacuum separating means for keeping said object and contact mask apart during optical alignment, said means applied to said deformable member;
• e) mechanical means for bringing said object and said contact mask in contact once aligned;
• and
• f) locking means for holding the transportable member, the transportable holding means and contact mask in an aligned relationship as a fixture, whereby said fixture can be transported for processing of the object.

An apparatus for contact masking a substrate comprising:

• first means for holding a substrate, said first means including a deformable disk, said deformable disk having a cutout the same shape as the substrate and includes a receptacle for securing the substrate;
• means for holding a contact mask;
• separating means for keeping said substrate and contact mask apart during optical alignment, said separating means including a pedestal having a top portion and a bottom portion, said top portion and said bottom portion being concentric cylinders having dimensions such that the top portion is free to slide over said bottom portion and have biasing means in between to provide a biasing force;
• means for providing a vacuum force through said pedestal to said first means;
• aligning means for optically aligning said substrate and said contact mask, said aligning means aligning through apertures in the contact mask to alignment features disposed on said substrate;
• second means for bringing substrate and said contact mask in contact once aligned, and locking means for holding together the first means and means for holding a contact mask in superposed aligned relation as a fixture, whereby the fixture can be transported for processing of the substrate.