Semiconductor memory device having static random access memory

A semiconductor memory device having a plurality of word lines, a plurality of complementary data line pairs each intersecting said plurality of word lines, and a plurality of memory cells provided at intersections of said plurality of word lines and said plurality of complementary data line pairs,

• each of said memory cells having a first and a second driver insulated gate field effect transistor of a first conductivity type, a first and a second load insulated gate field effect transistor of a second conductivity type different from the first conductivity type of said driver insulated gate field effect transistors, and a first and a second transfer insulated field effect transistor, said first and said second driver insulated gate field effect transistor and said first and said second transfer insulated gate field effect transistor being formed on a major surface of a semiconductor substrate,
• a gate of said first driver insulated gate field effect transistor and a gate of said first load insulated gate field effect transistor being coupled with a drain of said second driver insulated gate field effect transistor and a drain of said second load insulated gate field effect transistor, a gate of said second driver insulated gate field effect transistor and a gate of said second load insulated gate field effect transistor being coupled with a drain of said first driver insulated gate field effect transistor and a drain of said first load insulated gate field effect transistor so as to form complementary inverter circuits, thereby establishing a flip-flop circuit, said drain of said first driver insulated gate field effect transistor and said drain of said first load insulated gate field effect transistor being a first storage node of said flip-flop circuit, said drain of said second driver insulated gate field effect transistor and said drain of said second load insulated gate field effect transistor being a second storage node of said flip-flop circuit, said first storage node of said flip-flop circuit being coupled to a first line of said complementary data line pair via a source-drain path of said first transistor insulated gate field effect transistor, said second storage node of said flip-flop circuit being coupled to a second line of said complementary data line pair via a source-drain path of said second transfer insulated gate field effect transistor,
• said gates of said first and second driver insulated gate field effect transistors and said gates of said first and second transfer insulated gate field effect transistors being formed by a first level conductive layer on said major surface of said semiconductor substrate,
• a first coupling layer for coupling sources of said first and second driver insulated gate field effect transistors with a predetermined potential being formed on said major surface of said semiconductor substrate,
• a second coupling layer for coupling either a source or a drain of said first transfer insulated gate field effect transistor with said first line of said complementary data line pair being formed on said major surface of said semiconductor substrate,
• a third coupling layer for coupling either a source or a drain of said second transfer insulated gate field effect transistor with said second line of said complementary data line pair being formed on said major surface of said semiconductor substrate, said first coupling layer, said second coupling layer and said third coupling layer being formed by a second level conductive layer on said major surface of said semiconductor substrate,
• said gates of said first and second load insulated gate field effect transistors being formed by a third level conductive layer on said major surface of said semiconductor substrate,
• sources and said drains of said first and second load insulated gate field effect transistors being formed by a fourth level conductive layer on said major surface of said semiconductive substrate;
• said first line and said second line of said complementary data line pair being formed by a fifth level conductive layer on said major surface of said semiconductor substrate,
• said first line of said complementary data line pair formed by said fifth level conductive layer being coupled with either said source or said drain of said first transfer insulated gate field effect transistor via said second coupling layer formed by said second level conductive layer,
• said second line of said complementary data line pair formed by said fifth level conductive layer being coupled with either said source or said drain of said second transfer insulated gate field effect transistor via said third coupled layer formed by said second level conductive layer, and
• said second level conductive layer being patterned using a photo-mask having a phase shifter so as to form said first coupling layer, said second coupling layer and said third coupling layer.