Polymeric dyes for antireflective coatings
AssigneeInternational Business Machines Corporation
InventorsChristopher J. Knors, Elwood H. Macy, Martin Moreau
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Abstract
A composition and methods for the use and manufacture thereof are provided for a polymeric dye. The composition comprises one or more aminoaromatic chromophores in conjunction with polymers having an anhydride group or the reaction products thereof. The composition is particularly useful as an underlaying antireflective coating with microlithographic photoresists for the absorbtion of near or deep ultraviolet radiation.
Claims2
A film forming composition comprising the N,N-disubstituted amide reaction product of at least one aminoaromatic chromophore with a polymer comprising an anhydride.
Dependencies are inferred from the claim text.