Method of manufacturing a diamond heat sink
AssigneeSumitomo Electric Industries, Ltd.
InventorsTakahisa Iguchi, Tsutomu Nakamura, Tetsuo Nakai
Life of this patent
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Abstract
A polycrystalline diamond is prepared by chemical vapor deposition (step 101). A surface of the polycrystalline diamond is metallized (step 102). The metallized surface of the polycrystalline diamond is grooved with a YAG laser (step 103). A wedge or the like is driven into the grooves of the polycrystalline diamond to pressurize the same, whereby the polycrystalline diamond is divided along the grooves (step 104). Alternatively, a surface of a polycrystalline diamond prepared by chemical vapor deposition is grooved with a YAG laser (step 112), so that the surface of the polycrystalline diamond is metallized (step 113) after the grooving.
Claims10
A method of manufacturing diamond heat sinks made of a diamond synthesized by chemical vapor deposition, said diamond having a pair of main surfaces positioned opposite each other and electrically insulated from each other, said method comprising the following steps:
- (a) preparing said diamond in the form of a polycrystalline diamond;
- (b) forming grooves in surfaces of said polycrystalline diamond;
- (c) forming a metallized film on at least one surface of said pair of main surfaces;
- and
- (d) mechanically dividing said polycrystalline diamond along said groove to form simultaneously a plurality of individual diamond heat sinks each having at least one solderable surface.
A method of manufacturing diamond heat sinks made of a diamond synthesized by chemical vapor deposition, said diamond having a pair of main surfaces positioned opposite each other and electrically insulated from each other, said method comprising the following steps:
- (a) preparing said diamond in the form of a polycrystalline diamond;
- (b) forming a metallized film on at least one surface of said pair of main surfaces;
- (c) forming grooves in surfaces of said polycrystalline diamond;
- and
- (d) mechanically dividing said polycrystalline diamond along said grooves to form simultaneously a plurality of individual diamond heat sinks each having at least one solderable surface.
Dependencies are inferred from the claim text.