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US 5,290,417 AGranted
Apparatus with axial gas distribution for vacuum coating substrates on a carousel
AssigneeLeybold Aktiengesellschaft
InventorJaroslav Zejda
Life of this patent
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Abstract
A coating machine (1) has a carousel (5) with location seats (18, 19) for substrates (3) that are to be coated. Process chambers (8) are located in a circle coaxially to the carousel (5) outside of the carousel (5). All substrates (3) located in the process chambers (8) can be removed at the same time from the process chambers (8) and put down on the carousel (5) by means of substrate transfer devices (9). After turning the carousel (5) slightly, new substrates (3) can be transported simultaneously into the process chambers (8).
Claims14
Apparatus for coating substrates, comprising
- a plurality of individually evacuable process chambers located about a central axis,
- a carousel for transporting substrates circular path about said central axis for coating at said process chambers, said carousel having a plurality of substrate location seats,
- a central evacuation conduit located coaxially with said central axis,
- a plurality of radial evacuation conduits connecting said central evacuation conduit to said process chambers.
1 more element
Dependencies are inferred from the claim text.