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AssigneesCommissariat a l'Energie Atomique, Etat Francais Represente Par Le Delegue General Pour L'Armenent
InventorsLuc Nouvelot, Aime Perrin
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Source evaporation machine for covering samples optionally by a mixture produced by several sources (3). Mobile covers (6) are placed between the sources (3) and the sample. The covers (6) are designed so as to ensure that the solid parts (23,24) and the openings (21,25) alternate and the sources (3) move relative to the covers in such a way that different circumferences of the covers pass in front of them. As the angular sectors surrounded by the openings differ for each circumference, the degree of hiding of the sources (3) can be regulated in a very accurate and reliable manner. It is possible to modify the flow of the source on the sample or, in the case of several sources, vary the composition of the deposited mixture.
Apparatus for controlling a material flow emitted by a source (3) mounted on a support and characterized by a cover constituted by solid portions (23,24) and openings (21,25), a motor (9) making the cover (6) move in front of the source (3) and by another support (1,15) on which are fitted the cover and the motor, one of the supports being mobile with respect to the other, so that it is possible to vary the degree of hiding of the source, defined as the proportion, with respect to the total passage time, of the time during which the solid portions of the cover extend in front of the source.
Dependencies are inferred from the claim text.