Back to results
US 5,285,131 AGranted
Vacuum-sealed silicon incandescent light
AssigneeUniversity of California, Berkeley
InventorsRichard S. Muller, Carlos H. Mastrangelo
Life of this patent
Estimating the term…
Abstract
A microlamp including a polysilicon filament coated with a protective layer and enclosed by a window in a vacuum-sealed cavity.
Claims12
A microlamp, comprising:
- a substrate;
- a cavity formed in said substrate;
- a polysilicon filament coated with a protective layer disposed in said cavity;
- and
- a window means for vacuum sealing said cavity wherein radiation emitted by said filament is visible through said window means.
2 more elements
A microstructure comprising:
- a substrate having a groove;
- sealing means disposed over said groove to form a sealed cavity;
- a filament suspended in said cavity, the ends of said filament connected to the sides of said cavity;
- and
- means for heating said filament to cause said filament to produce radiation.
2 more elements
Dependencies are inferred from the claim text.