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US 5,278,494 AGranted
Wafer probing test machine
AssigneeTokyo Electron Yamanashi Limited
InventorTadashi Obigane
Life of this patent
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Abstract
A wafer probing test machine including a loading/unloading section defined by a first frame to enclose plurality of cassette stages therein, a test section defined by a second frame for enclosing a test stage therein, an elevator for moving at least one of the cassette stages up and down, and a wafer transfer system having a multi-jointed arm for taking out the wafer from a cassette and transferring the wafer onto the test stage.
Claims5
A wafer probing test machine comprising:
- a loading/unloading section having a first frame enclosing a plurality of cassette stages therein;
- a test section defined by a second frame enclosing a test stage therein;
- an elevator for moving at least one of the cassette stages up and down;
- a wafer transferor having an expansion arm for taking out the wafer form a cassette and transferring the wafer onto the test stage;
- and
- a door attached to a top portion of the first frame such that in testing operation, said door is opened, followed by moving the cassette stage upward, then loading the cassette on the cassette stage, moving the cassette stage downward, and then closing the door so as to position the cassette within the loading/unloading section.
3 more elements
Dependencies are inferred from the claim text.