Wafer probe station with integrated environment control enclosure
AssigneeCascade Microtech, Inc.
InventorsWarren K. Harwood, Martin J. Koxxy, Paul A. Tervo
Life of this patent
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Abstract
A wafer probe station is equipped with a compact, integrated controlled-environment enclosure providing EMI shielding, substantially hermetic sealing for a dry purge gas for low-temperature testing, and a dark environment. The sealing isolation of the wafer chuck and test probe provided by the enclosure is maintained despite the fact that the probe and chuck positioning mechanisms extend partially outside the enclosure, with positioning members extending movably between the interior and exterior of the enclosure. Sealing is maintained by movable sealing members at the locations where the positioning members penetrate the enclosure.
Claims6
A probe station comprising:
- (a) a substantially planar surface for holding a test device on said surface;
- (b) a holder for an electrical probe for contacting the test device;
- (c) a pair of positioning mechanisms for selectively moving both said surface and said holder, independently of each other, toward or away from the other along an axis of approach;
- and
- (d) an enclosure surrounding said surface for maintaining a seal around said surface despite movement by said positioning mechanisms of either one of said surface and holder, respectively, toward or away from the other along said axis of approach, said pair of positioning mechanisms each being located at least partially outside of said enclosure.
Dependencies are inferred from the claim text.