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US 5,264,010 AGranted
Compositions and methods for polishing and planarizing surfaces
AssigneeRodel, Inc.
InventorsGregory Brancaleoni, Elmer W. Jensen, John V. H. Roberts
Life of this patent
Estimating the term…
Abstract
An abrasive composition for use in polishing or planarizing the surface of a work piece is provided comprising about 30 to 50 percent of cerium oxide; about 8 to about 20 percent of fumed silica and about 15 to about 45 percent of precipitated silica. Methods using the composition to polish or planarize the surfaces of work pieces, as well as products produced by such methods, are also provided.
Claims24
An abrasive composition for use in polishing or planarizing the surface of a work piece comprising about 30 to about 50 percent of cerium oxide;
- about 8 to about 20 percent of fumed silica and about 15 to about 45 percent of precipitated silica.
Dependencies are inferred from the claim text.