System and method for applying a liquid
AssigneesTokyo Electron Limited, Electron Kyushu Limited, Kabushiki Kaisha Toshiba
InventorsKiyohisa Tateyama, Keizo Hasebe
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Abstract
A liquid applying system according to the present invention comprises a liquid supply source and a nozzle communicating with the liquid supply source. The nozzle comprises a liquid storing portion for storing a liquid supplied from the liquid supply source, a number of small passages communicating with the liquid storing portion, each of the small passages having a transverse section which is smaller than that of the liquid storing portion, and a slit-like passage communicating with the small passages, in which liquids from the small passages flow together and from which the liquids are continuously discharged like a curtain toward a semiconductor wafer.
Claims14
A system for applying a liquid to an object to be processed, comprising:
- a liquid supply source;
- and
- nozzle means communicating with said liquid supply source;
- said nozzle means including:
- a liquid storing portion for storing a liquid supplied from said liquid supply source;
- a plurality of small passages communicating with said liquid storing portion, each of said small passages having a transverse section which is smaller than that of said liquid storing portion;
- and
- a slit passage communicating with said small passages, in which liquids flowing from said small passages are mixed together and discharged from said slit passage toward said object to be processed.
A method for applying a liquid to an object to be processed, comprising the steps of:
- (a) preparing the object to be processed;
- (b) preparing nozzle means, said nozzle means including:
- a liquid storing portion communicating with a liquid supply source, for storing a liquid supplied from a liquid supply source;
- a plurality of small passages communicating with said liquid storing portion, each of said small passages having a transverse section which is smaller than that of said liquid storing portion;
- and
- a slit passage communicating with said small passages, in which liquids flowing from said small passages are mixed together and discharged from said slit passage toward said object to be processed;
- (c) causing an opening of the slit passage of said nozzle means to face said object to be processed;
- (d) discharging the liquids from said nozzle means to said object to be processed while moving at least one of said nozzle means and said object to be processed;
- and
- (e) separating said nozzle means from said object to be processed.
Dependencies are inferred from the claim text.