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US 5,237,238 AGranted
Adjusting device for microscopic movements
AssigneeOmicron Vakuumphysik GmbH
InventorsThomas Berghaus, Peter Klaede
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AssigneeOmicron Vakuumphysik GmbH
InventorsThomas Berghaus, Peter Klaede
Estimating the term…
The description relates to an adjusting device 1 for microscopic movements and comprising a carrier element 3 with, fixed on the carrier element 3, drive elements 6a, 6b, 6c which have a piezoelectric transducer which utilises the shear effect and which have a bearing element 5 which rests on the drive elements 6a, b, c. So that such an adjusting device 1, regardless of its position, is able to carry out high-precision reproducible microscopic movements, in particular also movements in a vertical direction being possible while under load, the form and disposition of drive element 6 and bearing element 5 are designed for the performance of a guided microscopic movement. In addition, a pressure applying device 8 is provided which presses the bearing element 5 and the drive element 6 against one another with a predetermined force. Preferably, the pressure applying device comprises at least one magnet 17 which attracts the bearing element 5 with an adjustable force. According to particular embodiments, guided rotary movements are also feasible with the adjusting device according to the invention.
An adjusting device for microscopic movements, with a carrier element with, fixed on the carrier element, at least one drive element comprising a piezoelectric transducer which utilises the shear effect, and with a bearing element which rests on the drive element, characterized in that only the drive element (6) and the bearing element (5) are in their form and disposition constructed for mutual mounting and for the performance of a guided microscopic movement, and in that a pressure applying device (8) is provided which presses the bearing element (5) and the drive element (6) against each other with a predetermined force at right-angles to the direction of movement, and characterised in that the bearing element (5) is a cross-sectionally partially cylindrical or polygonal rod, of which the cylindrical surface (23) or at least two of its lateral surfaces (25a, 25b) rest on at least one drive element (6).
An adjusting device for microscopic movements, with a carrier element with, fixed on the carrier element, at least one drive element comprising a piezoelectric transducer which utilises the shear effect, and with a bearing element which rests on the drive element, characterized in that only the drive element (6) and the bearing element (5) are in their form and disposition constructed for mutual mounting and for the performance of a guided microscopic movement, and in that a pressure applying device (8) is provided which presses the bearing element (5) and the drive element (6) against each other with a predetermined force at right-angles to the direction of movement, and characterised in that the bearing element (5) is a displaceable plate (15) having a guide groove (30) in which rests the drive element (6), and in that the guide groove (30) is constituted by two cylindrical rods (16a, 16b) which are fixed on the displaceable plate (15) and which bear on each other.
An adjusting device for microscopic movements, with a carrier element with, fixed on the carrier element, at least one drive element comprising a piezoelectric transducer which utilises the shear effect, and with a bearing element which rests on the drive element, characterized in that only the drive element (6) and the bearing element (5) are in their form and disposition constructed for mutual mounting and for the performance of a guided microscopic movement, and in that a pressure applying device (8) is provided which presses the bearing element (5) and the drive element (6) against each other with a predetermined force at right-angles to the direction of movement, and characterized in that the bearing element (5) is a turntable, said turntable (5) being constructed as a truncated cone the conical surface (20) of which rests on at least one drive element (6).
An adjusting device for microscopic movements, with a carrier element with, fixed on the carrier element, at least one drive element comprising a piezoelectric transducer which utilises the shear effect, and with a bearing element which rests on the drive element, characterized in that only the drive element (6) and the bearing element (5) are in their form and disposition constructed for mutual mounting and for the performance of a guided microscopic movement, and in that a pressure applying device (8) is provided which presses the bearing element (5) and the drive element (6) against each other with a predetermined force at right-angles to the direction of movement, and characterised in that the pressure applying device has at least one piezoelectric transducer (9a) biased by a spring (10).
An adjusting device for microscopic movements, with a carrier element with, fixed on the carrier element, at least one drive element comprising a piezoelectric transducer which utilises the shear effect, and with a bearing element which rests on the drive element, characterized in that only the drive element (6) and the bearing element (5) are in their form and disposition constructed for mutual mounting and for the performance of a guided microscopic movement, and in that a pressure applying device (8) is provided which presses the bearing element (5) and the drive element (6) against each other with a predetermined force at right-angles to the direction of movement, and characterized in that on the side of the piezoelectric transducer (33) which is towards the bearing element (5) there is at least one punctiform support (27), said punctiform support (27) consisting of a ball (7) mounted on a ball seating (12).
An adjusting device for microscopic movements, with a carrier element (2) with, fixed on the carrier element, at least one drive element (6) comprising a piezoelectric transducer which utilises the shear effect, and with a bearing element (5) which rests on the drive element, characterized in that a pressure applying device (8) is provided which presses the bearing element (5) and the drive element (6) against each other with a predetermined force at right-angles to the direction of movement, and characterized in that to trigger the shear effect drive of the piezoelectric transducer, a control unit (18) is connected to the piezoelectric transducer which delivers voltage pulses to it, said pulses having a gently rising or falling flank which is followed by a steeply falling or rising flank, respectively and wherein the bearing element (5) has inertia which is largely overcome by the gently rising or falling flank to cause the bearing element (5) to move, said inertia essentially preventing reverse movement of the bearing element (5) by the steeply falling or rising flank.
An adjusting device for microscopic movements, with a carrier element (2) with, fixed on the carrier element, at least one drive element (6) comprising a piezoelectric transducer which utilises the shear effect, and with a bearing element (5) which rests on the drive element, characterized in that a pressure applying device (8) is provided which presses the bearing element (5) and the drive element (6) against each other with a predetermined force at right-angles to the direction of movement, and characterized in that to trigger the shear effect movement of the piezoelectric transducer, a control unit (18) is connected to the piezoelectric transducer which delivers to the transducer a predetermined voltage pattern with different rise and fall times, in order to drive the bearing element (5) within the framework of the maximum deflection of the piezoelectric transducer (6), said bearing element (5) having inertia whereby it responds with one displacement corresponding to a predetermined rise time, and responds with a different displacement corresponding to a predetermined fall time which is different from said rise time.
An adjusting device for microscopic movements, with a carrier element with, fixed on the carrier element, at least one drive element comprising a piezoelectric transducer which utilizes the shear effect, and with a bearing element which rests on the drive element, characterized in that only the drive element (6) and the bearing element (5) are in their form and disposition constructed for mutual mounting and for the performance of a guided microscopic movement, and in that a pressure applying device (8) is provided which presses the bearing element (5) and the drive element (6) against each other with a predetermined force at right angles to the direction of movement, said bearing element (5) being a rotationally symmetrical cylindrical component (31) having a peripheral surface (32) and which bears on at least one drive element (6) adapted to the shape of the peripheral surface (32), the piezoelectric transducer (33) being polarised in the peripheral direction of the peripheral surface (32), said bearing element (5) being a cylindrical rod (31) while the drive element (6) is a hollow cylinder from which a portion has been cut and which engages around the bearing element (5).
An adjusting device for microscopic movements, with a carrier element with, fixed on the carrier element, at least one drive element comprising a piezoelectric transducer which utilizes the shear effect, and with a bearing element which rests on the drive element, characterized in that only the drive element (6) and the bearing element (5) are in their form and disposition constructed for mutual mounting and for the performance of a guided microscopic movement, and in that a pressure applying device (8) is provided which presses the bearing element (5) and the drive element (6) against each other with a predetermined force at right angles to the direction of movement, said pressure applying device (8) having at least one magnet (17) which is fixed on an element (2 or 5) and which is disposed at a distance from the other element (5 or 2).
An adjusting device for microscopic movements, with a carrier element with, fixed on the carrier element, at least one drive element comprising a piezoelectric transducer which utilizes the shear effect, and with a bearing element which rests on the drive element, characterized in that only the drive element (6) and the bearing element (5) are in their form and disposition constructed for mutual mounting and for the performance of a guided microscopic movement, and in that a pressure applying device (8) is provided which presses the bearing element (5) and the drive element (6) against each other with a predetermined force at right angles to the direction of movement, in that to trigger the shear movements of the piezoelectric transducers (9, 33), a control unit (18) is connected to the piezoelectric transducers which simultaneously delivers identical voltage pulses to all the piezoelectric transducers (9, 33), in that the control unit (18) delivers voltage pulses which initially have a gently rising or falling flank which is followed by a steeply falling or rising flank, in that the control unit (18) delivers an adjustable or predetermined voltage pattern in order continuously to position the movable element (2 or 5) within the framework of the maximum deflection of the piezoelectric transducers (9, 33), and in that the control unit (18) comprises a device for measuring the adjustment path or angle of adjustment, the measured signal serving to linearise and to increase the accuracy of positioning.
An adjusting device for microscopic movements, with a carrier element with, fixed on the carrier element, at least one drive element comprising a piezoelectric transducer which utilizes the shear effect, and with a bearing element which rests on the drive element, characterized in that only the drive element (6) and the bearing element (5) are in their form and disposition constructed for mutual mounting and for the performance of a guided microscopic movement, and in that a pressure applying device (8) is provided which presses the bearing element (5) and the drive element (6) against each other with a predetermined force at right angles to the direction of movement, in that to trigger the shear effect drive of the piezoelectric transducer, a control unit (18) is connected to the piezoelectric transducer which delivers voltage pulses to it, said pulses having a gently rising or falling flank which is followed by a steeply falling or rising flank, respectively, and wherein the bearing element (5) has inertia which is largely overcome by the gently rising or falling flank and which results in movement of the bearing element (5), said inertia essentially preventing reverse movement of the bearing element (5) by the steeply falling or rising flank of the pulses.
An adjusting device for microscopic movements, with a carrier element with, fixed on the carrier element, at least one drive element comprising a piezoelectric transducer which utilizes the shear effect, and with a bearing element which rests on the drive element, characterized in that only the drive element (6) and the bearing element (5) are in their form and disposition constructed for mutual mounting and for the performance of a guided microscopic movement, and in that a pressure applying device (8) is provided which presses the bearing element (5) and the drive element (6) against each other with a predetermined force at right angles to the direction of movement, in that to trigger the shear effect drive of the piezoelectric transducer, a control unit (18) is connected to the piezoelectric transducer which delivers to the transducer an adjustable voltage pattern with predetermined different rise and fall times, in order to continuously position the bearing element (5) within the framework of the maximum deflection of the piezoelectric transducer (6), said bearing element (5) having inertia whereby it responds with one displacement corresponding to said predetermined rise time, said displacement being different from that corresponding to said different predetermined fall time.
Dependencies are inferred from the claim text.