Process for depositing an oxide epitaxially onto a silicon substrate and structures prepared with the process
AssigneeMartin Marietta Energy Systems, Inc.
InventorsRodney A. McKee, Frederick J. Walker
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Abstract
A process and structure involving a silicon substrate utilizes an ultra high vacuum and molecular beam epitaxy (MBE) methods to grow an epitaxial oxide film upon a surface of the substrate. As the film is grown, the lattice of the compound formed at the silicon interface becomes stabilized, and a base layer comprised of an oxide having a sodium chloride-type lattice structure grows epitaxially upon the compound so as to cover the substrate surface. A perovskite may then be grown epitaxially upon the base layer to render a product which incorporates silicon, with its electronic capabilities, with a perovskite having technologically-significant properties of its own.
Claims19
A process for growing an epitaxial oxide having a sodium chloride-type lattice structure onto a silicon substrate comprising the steps of:
- developing an ultra high vacuum, oxygen-free environment about a silicon substrate having a surface which has been cleaned to atomic cleanliness and raised to a high temperature;
- depositing an amount of a metal from a flux source of the metal upon the substrate surface until a fraction of a monolayer of the metal covers the substrate surface while maintaining the environment of the silicon substrate oxygen-free and at a high temperature so that the metal and the silicon of the substrate react to form a submonolayer of a silicide which is epitaxially matched to that of silicon at the metal/silicon interface;
- lowering the temperature of the substrate to between about 200.degree. C. and 300.degree. C.;
- depositing an additional amount of the metal from the flux source upon the substrate surface until the substrate surface is covered by about one monolayer of the metal;
- without exposing the metal-covered surface, raising the pressure of the high vacuum environment to a target pressure between about 1.times.10.sup.-6 torr and 5.times.10.sup.-6 torr with the introduction of oxygen and introducing an additional amount of the metal from the flux source into the high vacuum environment necessary to deposit the metal upon the substrate surface at a relatively slow rate;
- upon reaching the target pressure, exposing the metal-covered surface to the oxygen and metal within the high vacuum environment so that epitaxial oxide begins to grow upon the substrate surface;
- and
- building up the epitaxial oxide upon the substrate in a layered fashion by cyclically exposing the metal-covered substrate surface to additional amounts of the metal from the flux source and oxygen.
A process for growing an epitaxial oxide having a sodium chloride-type lattice structure onto a silicon substrate comprising the steps of:
- developing an ultra high vacuum, oxygen-free environment about a silicon substrate having a surface which has been cleaned to atomic cleanliness and raised to a temperature of between about 850.degree. and 1050.degree. C.;
- while maintaining the oxygen-free environment of the substrate and maintaining the temperature of the substrate at no less than about 850.degree. C., depositing a metal from a flux source of the metal upon the clean substrate surface until a fraction of a monolayer of the metal covers the substrate surface and so that the metal and the silicon of the substrate react to form a submonolayer of a silicide at the metal/silicon interface wherein the submonolayer of silicide is epitaxially matched to silicon;
- lowering the temperature of the substrate to between about 200.degree. and 300.degree. C.;
- depositing an additional amount of the metal from the flux source upon the substrate until the substrate surface is covered by about one monolayer of the metal;
- without exposing the metal-covered surface, raise the pressure of the high vacuum environment to a target pressure between about 1.times.10.sup.-6 torr and 5.times.10.sup.-6 torr with the introduction of oxygen and introducing an additional amount of the metal from the flux source into the high vacuum environment needed to deposit the metal upon the substrate surface at a rate between about 0.01 nm/sec and 0.05 nm/sec.
- upon reaching the target pressure, exposing the metal-covered surface to the oxygen and metal within the high vacuum environment so that epitaxial oxide begins to grow upon the substrate surface;
- and
- building up the epitaxial oxide upon the substrate surface in a layered fashion by cyclically exposing the metal-covered substrate surface to additional amounts to the metal from the flux source and oxygen.
A structure including a substrate of silicon, the improvement comprising:
- a submonolayer of silicide covering a surface of the silicon substrate wherein the silicide is epitaxially matched to silicon;
- a monolayer of a metal epitaxially covering the surface of the silicon substrate and the submonolayer of silicide;
- and
- a film of oxide epitaxially covering the metal-covered substrate surface wherein the film includes additional layers of the metal combined with oxygen.
Dependencies are inferred from the claim text.