1,2-quinonediazide containing radiation-sensitive resin composition utilizing methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate or methyl 3-methoxypropionate as the solvent
AssigneeJapan Synthetic Rubber Co., Ltd.
InventorsYoshihiro Hosaka, Ikuo Nozue, Masashige Takatori, Yoshiyuki Harita
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Abstract
A radiation-sensitive resin composition comprising a solution of an alkali-soluble resin and a radiation-sensitive compound in a solvent comprising a monooxymonocarboxylic acid ester. This composition has a high storage stability (i.e., a very small amount of fine particles are formed during storage) and is suited for use as a resist for making integrated circuits.
Claims8
A radiation-sensitive resin composition, comprising a solution of 100 parts by weight of an alkali-soluble resin and 5 to 100 parts by weight of a 1,2-quinonediazide compound as a radiation-sensitive compound in a solvent consisting essentially of at least one member selected from the monooxymonocarboxylic acid esters represented by the following formulas:
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Dependencies are inferred from the claim text.