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US 5,211,802 AGranted
Method for producing silicon single crystal from polycrystalline rod formed by continous casting
AssigneeOsaka Titanium Co., Ltd.
InventorsKyojiro Kaneko, Hideyuki Mizumoto, Teruoki Misawa
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Abstract
A method of producing single-crystal silicon is disclosed. Polycrystalline silicon rod is formed from polycrystalline silicon granules, lumps or a mixture thereof by continuous casting through electromagnetic induction. Then, silicon single cyrstal is grown from the polycrystalline silicon rod by the FZ method.
Claims6
A manufacturing method for single-crystal silicon, comprising:
- i) forming a polycrystalline silicon rod from polycrystalline silicone granules, lumps or a mixture thereof by continuous casting through electromagnetic induction;
- and
- ii) growing silicon single crystal from said polycrystalline silicon rod by the float-zone method.
A method for producing polycrystalline silicon rod from polycrystalline silicon granules, lumps or mixture thereof by continuous casting through electromagnetic induction.
Dependencies are inferred from the claim text.