Metrology

Abstract

A multiaxis measuring probe 10 for continuous measurement of workpieces (e.g. roundness, other form, or size measurment) has in one embodiment a stylus 50 suspended by resilient forces acting in opposition so as to determine an equilibrium rest position. This appears to improve the dynamic response/accuracy trade-off of the probe. The resilient forces are preferably provided by a diaphragm spring 40,140,210 and one or more opposing springs 80A,80B,180,214. The stylus 50 is preferably held magnetically to a stylus mount 34,134,206,208 via precision bearings, and the resilient forces act on the stylus mount. During calibration, a series of probe data is gathered from probe/sensor output signals at given positions of the probe along curved paths. A corresponding series of positional data for the given positions is gathered independently of the probe. A correlation is made between the probe data and the positional data so as to obtain calibration parameters for correction of measurement signals. These calibration parameters are stored with a measurement expression for later use with probe output signals to obtain corrected measurement signals.

Dependencies are inferred from the claim text.