Silicon single crystal pulling-up apparatus
AssigneeToshiba Ceramics Co., Ltd.
InventorsShuitsu Matsuo, Kazuo Ito, Masayuki Saito
Life of this patent
Estimating the term…
Abstract
A silicon single crystal pulling-up apparatus includes a silica glass crucible for accommodating a melted silicon material, a cylindrical member made of a carbon composite material which is composed of a carbon fiber wound round a cylinder, impregnated with a resin and carbonized, disposed on an upper end of a cylindrical portion of the crucible for accommodating the melted silicon in association with the cylindrical portion of the crucible, a wall thickness of the cylindrical member being not more than 3 mm, a rotational shaft for rotating the crucible, and a crucible support fixed to an upper end of the rotational shaft for supporting the crucible.
Claims4
A silicon single crystal pulling-up apparatus comprising:
- a silica glass crucible for accommodating a melted silicon material;
- a cylindrical member made of a carbon composite material which is composed of a carbon fiber with a diameter not more than about 3 mm wound in a shape of cylinder in one layer, impregnated with a resin and carbonized, said member being in contact with and covering the outer side surface of a cylindrical portion of said crucible, the wall thickness of said cylindrical member being not more than about 3 mm;
- a rotational shaft for rotating said crucible;
- and
- a crucible support fixed to an upper end of said rotational shaft for supporting said crucible.
Dependencies are inferred from the claim text.