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AssigneeOlympus Optical Co., Ltd.
InventorsMasahiko Kato, Takao Okada, Hiroshi Kajimura
Estimating the term…
A light beam from a light source is divided into two beams by a polarized beam splitter. The beam is reflected by a mirror, is converted into a P-polarized beam by a 1/4 .lambda. plate, passes through the beam splitter, is reflected by prisms, passes through a polarized beam splitter, is reflected by a mirror, is converted into a S-polarized beam by a 1/4 .lambda. plate, is reflected by the beam splitter, and is finally incident on a detector. The beam is converted into a S-polarized beam by a 1/2 .lambda. plate, is reflected by a polarized beam splitter, is reflected by the upper face of a cantilever supporting a probe, passes through a polarized beam splitter, is reflected twice in a prism, passes through the beam splitter, is reflected again by the cantilever, is converted into a S-polarized beam by a 1/4 .lambda. plate, is reflected by the beam splitter, is converted into a P-polarized beam by a 1/2 .lambda. plate, passes through the beam splitter, and is finally incident on the detector. The detector outputs the displacement of the cantilever from the optical path difference of the beams Lr and Lt.
An atomic force microscope for evaluating the surface of a sample, comprising:
An atomic force microscope for evaluating the surface of a sample, comprising:
An atomic force microscope comprising:
An atomic force microscope for evaluating the surface of a sample, comprising:
Dependencies are inferred from the claim text.