Vapor deposition apparatus
AssigneeKabushiki Kaisha Toshiba
InventorsYuusuke Sato, Akio Ui, Keiichi Akagawa, Toshimitsu Ohmine
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Abstract
An argon (Ar.sup.+) laser has a resonator. A reaction chamber is integrally formed in the resonator. A voltage is applied to electrodes, which discharge electricity to excite argon atoms in the resonator to produce a laser beam. The laser beam is continuously oscillated between total reflection mirrors disposed at opposite ends of the resonator. A substrate is disposed in the reaction chamber into which a material gas is introduced. The material gas absorbs the laser beam, to decompose and deposit as a thin film over the substrate.
Claims29
A vapor deposition apparatus comprising:
- (a) a laser having a resonator for exciting a laser medium with an excitation medium, to produce a laser beam;
- and
- (b) means for introducing a material gas into the resonator so that the laser beam may irradiate the material gas to cause a photochemical reaction of the material gas in the resonator.
A vapor deposition apparatus comprising:
- (a) a laser having a resonator for exciting a laser medium with an excitation medium, to produce a laser beam;
- (b) a reaction chamber formed in the resonator and separated from the laser medium with light transmitting means;
- and
- (c) means for introducing a material gas into the reaction chamber so that the laser beam may irradiate the material gas in the reaction chamber to cause a photochemical reaction of the material gas.
A vapor deposition apparatus comprising:
- (a) a laser having a resonator for exciting a laser medium with an excitation medium, to produce a laser beam;
- and
- (b) means for introducing a material gas into the resonator so that the laser beam may irradiate the material gas to cause a photochemical reaction of the material gas in the resonator,
- (c) the laser beam for irradiating the material gas in the resonator being continuously oscillated between a reflecting member and a substrate on which vapor deposition by the photochemical reaction is generated.
Dependencies are inferred from the claim text.