Radiation-sensitive mixture
AssigneeBASF SE
InventorSon N. Kim
Life of this patent
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Abstract
A radiation-sensitive mixture, essentially consisting of (a) a binder or binder mixture which is insoluble in water but soluble in aqueous alkaline solutions, (b) a compound which forms a strong acid on exposure to radiation and (c) one or more organic compounds which suppress the solubility of (a) in aqueous alkaline solutions, wherein component (c) is an organic compound of the general formula (I) ##STR1## where R.sup.1 and R.sup.2 are each hydrogen, alkyl, alkoxy, aryl or aralkyl and R.sup.3 and R.sup.4 are each alkyl, cycloalkyl, aralkyl, aryl or a radical ##STR2## where n is from 1 to 5 and R.sup.5 is alkyl, alkoxy, aryl or aralkyl, or R.sup.3 together with R.sup.4 form a five-membered to seven-membered ring via --(CH.sub.2).sub.m -- in which m is from 4 to 6, is suitable for the production of relief structures.
Claims10
A radiation-sensitive mixture, consisting essentially of effective amounts of
- (a) a binder or binder mixture which is insoluble in water but soluble in aqueous alkaline solutions,
- (b) a compound which forms a strong acid on exposure to radiation and
- (c) one or more organic compounds which suppress the solubility of (a) in aqueous alkaline solutions, compound (c) is a compound of the general formula (I) ##STR19## where R.sup.1 and R.sup.2 are identical or different and are each hydrogen, alkyl, alkoxy, aryl or aralkyl, R.sup.3 and R.sup.4 are identical or different and are each alkyl, cycloalkyl, aralkyl, unsubstituted or alkyl- or halogen-substituted aryl or a radical ##STR20## where n is from 1 to 5 and Rs is alkyl, alkoxy, aryl or aralkyl, or R.sup.3 together with R.sup.4 forms a five-membered to seven-membered ring via --(CH.sub.2).sub.m -- in which m is from 4 to 6.
Dependencies are inferred from the claim text.