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US 5,203,981 AGranted
Vacuum-treatment apparatus
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorMoriaki Akazawa
Life of this patent
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Abstract
A vacuum-treatment apparatus employs a magnetically driven clamp which uses repulsive and attractive forces between magnets. The clamp mechanism is simplified, maintenance of the apparatus can be easily performed, and the surfaces which mechanically contact one another are decreased as much as possible so that a vacuum-treatment apparatus which generates less dust is obtained.
Claims6
A vacuum-treatment apparatus comprising:
- a vacuum container;
- a specimen table, positioned in said vacuum chamber, for supporting a specimen;
- a clamp ring including an embedded permanent magnet for pressing a specimen disposed on said specimen table;
- and
- an electromagnet for generating a magnetic field for selectively lifting said clamp ring perpendicularly from said specimen table and urging said clamp ring against a specimen disposed on said specimen table.
2 more elements
Dependencies are inferred from the claim text.