Series evaporator for vacuum vapor-deposition apparatus
AssigneeLeybold Aktiengesellschaft
InventorSiegfried Kleyer
Life of this patent
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Abstract
A series evaporator for vacuum vapor-deposition apparatus has several evaporators 5 with individual power control, heated by passing through a current, supported on column-like, electrical supply lines 3, 4 wherein the column-like supply lines 3, 4 are held by an electrically conductive support body 6 extending over the entire length of the series evaporator, and the supply lines 3 of the one polarity are connected to the support body 6 in an electrically conductive manner whereas the supply lines 4 of the other polarity pass through the support body 6 in an insulated manner and connected to conducting wires 7 disposed in an insulated manner.
Claims8
Series evaporator for vacuum deposition apparatus, comprising
- an electrically conductive support body,
- a column-like electrical supply line of one polarity connected to said support body and having a projection remote from said body,
- a column-like electrical supply line of another polarity passing through said support body and electrically insulated therefrom and having a projection remote from said body,
- a plurality of electrically conductive evaporators connected in series between the projections on said-column like electrical supply lines, and
- a plurality of electrically conductive bearing elements which serve to electrically connect said evaporators to each other and to said projections, thereby completing the circuit between said projections via said evaporators.
Dependencies are inferred from the claim text.