Method of fabricating two-terminal non-linear devices
AssigneeU.S. Philips Corporation
InventorJohn M. Shannon
Life of this patent
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Abstract
Large numbers of small sized, physically discrete, two-terminal non-linear devices, typically around 20 .mu.m across, are produced simultaneously, each exhibiting substantially identical physical and electrical properties by forming on the surface of a temporary support a multiple layer formation consisting of a series of thin film layers of selected materials and uniform thicknesses constituting a diode structure, for example a MIM type or p-n-p punch-through type structure; scribing the multiple layer formation in a regular pattern to define portions; and thereafter removing the support and separating the portions into physically discrete elements, each of which forms an individual non-linear device.
Claims27
A method of fabricating two-terminal non-linear devices comprising the steps sequentially depositing a series of separate thin film layers of selected material on a surface of a support to form a multiple layer formation on said surface, said multiple layer formation constituting a diode structure;
- scribing the multilayer formation to define portions thereof and thereafter removing said support from the portions and physically separating the portions into discrete elements each constituting a non-linear device.
Dependencies are inferred from the claim text.