Semiconductor substrate etching apparatus
AssigneeKabushiki Kaisha Toshiba
InventorKiyoshi Yoshikawa
Life of this patent
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Abstract
A semiconductor substrate etching apparatus for etching a tapered outer circumferential surface of a semiconductor substrate. A semiconductor substrate supply unit, an X-Y stage unit, an etchant applying unit, a cleaning unit, a baking unit, and a semiconductor substrate recovering unit are arranged in a horizontal plane in the described order. Semiconductor substrates are sequentially transferred by a transfer mechanism from the semiconductor substrate supply unit to the semiconductor substrate recovering unit in the described order. A control unit controls the transfer mechanism to perform the transferring of the semiconductor substrate, and controls the X-Y stage unit in response to a position detection signal, outputted from a position detector, for positioning the semiconductor substrate on the X-Y stage unit.
Claims5
A semiconductor substrate etching apparatus for etching a beveled outer edge of a semiconductor substrate, comprising:
- a semiconductor substrate supply means for placing a tray, receiving a semiconductor substrate, therein;
- registration means for registering a semiconductor substrate transferred from the semiconductor substrate supply means thereto, the registration means including:
- X-Y stage means for resting the semiconductor substrate transferred from the semiconductor substrate supply means thereon for positioning in an x-y coordinate system;
- and position detecting means for detecting a position in the x-y coordinate system of the semiconductor substrate rested on the X-Y stage means to produce a position detection signal;
- etchant applying means including:
- a rotary table means for resting the semiconductor substrate, transferred from the registration means, thereon for rotation;
- and etchant applying means, arranged in the vicinity of the rotary table means, for applying an etchant to the tapered outer edge of the semiconductor substrate rested on the rotary table means;
- cleaning means for cleaning the semiconductor substrate transferred from the rotary table means thereto and for drying the cleaned semiconductor substrate;
- baking means including:
- hot plate means for resting a cleaned and dried semiconductor substrate, transferred from the cleaning means, thereon and for baking the cleaned and dried semiconductor substrate for drying;
- semiconductor substrate recovering means for resting a tray to receive the baked semiconductor substrate, transferred from the baking means, thereon, the semiconductor substrate supply means, the X-Y stage means, the etchant applying means, the cleaning means, the baking means, and the semiconductor substrate recovering means being arranged in a horizontal plane in the described order;
- transfer means for sequentially transferring the semiconductor substrate in the described order from the semiconductor substrate supply means to the semiconductor substrate recovering means;
- and
- control means for controlling the transfer means to perform the transferring of the semiconductor substrate and for controlling the X-Y stage means in response to the position detection signal for positioning the semiconductor substrate on the X-Y stage means.
Dependencies are inferred from the claim text.