Double chamber vacuum apparatus for thin layer deposition
AssigneeConsorzio Ce.Te.V Centro Tecnologie del Vuoto
InventorsCarlo Misiano, Enrico Simonetti
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Abstract
An apparatus for thin layer vapor deposition has two horizontally spaced apart vacuum deposition chambers. Rearwardly and inwardly angled horizontal vacuum ducts are connected to the chambers, and a vacuum pumping device is connected to a further horizontal vacuum duct which communicates with the inwardly angled ducts. A computerized central system disposed between the chambers is operatively connected to the ducts and vacuum pumping device to enable either of the chambers to be used for set-up and evacuation while the other chamber is used for heating and deposition.
Claims1
An apparatus for thin layer vapor deposition comprising:
- two horizontally spaced apart thin layer vacuum deposition chambers and having doors opening to a front of the apparatus;
- respective rearwardly and inwardly angled horizontal vacuum ducts connected to said chambers;
- a further horizontal vacuum duct between said inwardly angled vacuum ducts and communicating therewith;
- vacuum pumping means connected to said further horizontal vacuum duct and received between said inwardly angled vacuum ducts;
- and
- a computerized central system disposed between said chambers and operatively connected to said ducts and said pumping means for enabling one of said chambers to be used for set up and evacuation while the other of said chambers effects heating and deposition and vice versa, said central system lying forwardly of said ducts.
Dependencies are inferred from the claim text.