Impurity diffusing furnace
AssigneeSamsung Electronics Co., Ltd.
InventorYunki Kim
Life of this patent
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Abstract
An impurity furnace is disclosed, which includes: an atmoscan tube 1, a gas inlet 20, a processor tube 2, a door flange 60 and a discharge tube 70. A pressure gage 80 is installed at a side of the door flange 60, for measuring the internal pressure of the atmoscan tube 1 and transmitting the measured value thereof in the form of electrical signals. A microcomputer 3 connected to pressure gage compares the measured value of the pressure gage with a preset reference value, and generates control signals in order to control the opening degree of a butterfly valve 90. The butterfly valve is connected to the microcomputer 3, the opening degree thereof being controlled by the value controlling the signals from the microcomputer 3. The discharge tube extends from the interior of the atmoscan tube to the butterfly valve.
Claims6
A method of operating an impurity diffusing furnace to control the gas discharge rate so as to maintain the internal pressure within the furnace substantially constant, which comprises:
- providing said furnace with a gas inlet, a gas outlet, an adjustable valve for the gas outlet, and a furnace door and door flange;
- establishing a predetermined preset pressure to be maintained within the furnace;
- introducing gas into the furnace;
- measuring the internal pressure within the furnace;
- comparing the measured pressure with the preset pressure;
- adjusting the valve of the gas outlet in response to the measured internal pressure to provide a substantially constant pressure within the furnace.
Dependencies are inferred from the claim text.