Crystal growth apparatus and process
AssigneeBestal Corporation
InventorsMorris S. S. Young, Shanxiang Zhang
Life of this patent
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Abstract
A circular crucible for use in VGF and VB methods of crystal growth includes: a seed well, a first transition region, a first stable growth region, a second transition region, and a major growth region.
Claims7
A method of growing single crystal structures in circular crucibles in VGF and VB processes comprising the following steps:
- growing a crystal form a small diameter seed crystal to an intermediate larger diameter in a first transition region of growth;
- growing the crystal in length at said intermediate diameter in an essentially stable growth region.
- growing the crystal from said intermediate diameter to a substantially larger target end product diameter in a second transition region of growth;
- growing the crystal to a target end product length in a stable major growth region.
A circular crucible for growing single crystal structures having a target diameter for use in VGF and VB methods of crystal growth comprising:
- at least first and second circular transition growth regions;
- said transition growth regions each comprising a truncated cone comprising a small open end and a large open end;
- the diameter of the large open end of said second transition region corresponding to said target diameter;
- a tubular seed well closed on one end and open on the other end, said open end of said seed well being mechanically aligned with and attached to the small open end of said first transition region;
- the diameters of said large open end of said first transition region and of the small open end of said second transition being equal to one and another and having a value substantially smaller than said target diameter;
- at least one stable tubular intermediate sized growth region open on both ends;
- one end of said intermediate sized growth region being mechanically aligned with and attached to said large open end of said first transition region;
- and the other end of said intermediate sized growth region being mechanically aligned with and connected to said small end of said second transition region;
- and a terminal tubular major growth region being mechanically aligned with and connected to said large open end of said second transition growth region.
A circular crucible for growing single crystal products having a target diameter for use in VGF and VB methods of crystal growth comprising:
- first and second truncated cone shaped transition growth regions;
- a seed well adjacent one end of said first transition growth region;
- an essentially stable intermediate sized growth region having a diameter substantially smaller than said target diameter interposed between said first and second transition regions;
- and a terminal product growth region adjacent said second transition growth region and having a diameter corresponding to said target diameter.
A circular crucible for growing single crystal products in accordance with claim 8 wherein:
- said target diameter is four inches.
Dependencies are inferred from the claim text.