US 5,138,368 AGranted

Fabrication of printed wiring boards by projection imaging

AssigneeGreyhawk Systems, Inc.

InventorsFrederic J. Kahn, Neil G. Bergstrom, David E. Stepner

Life of this patent

Estimating the term…

Loading patent…

Abstract

A hard copy such as a printed wiring board is fabricated by exposing to radiation a liquid crystal cell in which a desired pattern is written and directing the pattern-carrying radiation projected from the cell by transmission or reflection to a substrate which is coated with a material sensitive to the radiation and disposed alignedly at an exposure position by optical registration. The duration of the exposure is controlled for a given light intensity and for the type of the coating material. A pattern may be written in one cell substantially simultaneously as another cell is used for the projection imaging. After a produced pattern is compared with a reference pattern, corrections may be effected through a processor which controls the writing of a pattern in a cell.

Claims25

Dependent claims

An apparatus for exposing a substrate sensitive in a particular way to radiation of a specific wavelength by projecting an image from a liquid crystal cell to produce a hard copy having a predetermined pattern, said apparatus comprising:

(a) means for supporting said liquid crystal cell;
(b) means for establishing an image of said predetermined pattern within said liquid crystal cell;
(c) a source of radiation within a particular wavelength range including said specific wavelength;
(d) exposure means for directing said radiation to said liquid crystal cell and thereafter onto said substrate in a way which projects said image within the cell onto the substrate, thereby exposing said substrate to said image;
and
(e) exposure control means for controlling the total amount of said radiation which is directed onto said substrate from said liquid crystal cell, said exposure control means including means for measuring the amount of incident radiation that falls on the image plane of said substrate from said liquid crystal cell, thereby precisely controlling the amount of radiation to which said substrate is exposed;
(f) said substrate being placed in a specific image receiving position within a given plane prior to projection of said image within the cell onto the substrate, said image within said liquid crystal cell including first alignment indicia and said substrate including corresponding second alignment indicia, and the apparatus further comprising means for projecting the image of said first alignment indicia onto said given plane, said substrate also including
(i) a platen having a front surface for supporting said substrate within said given plane and a back surface opposite said front surface,
(ii) an arrangement including camera means located on the back surface side of said platen for optically establishing from the back surface side of the platen the positions of the projected image of said first alignment indicia and second alignment indicia with respect to one another, and
(iii) means for moving said platen and its supported substrate, if necessary, in order to place said second alignment indicia in substantial alignment with the projected image of said first alignment indicia, and to thereby place said substrate in said image receiving position.

7 more elements

A system for exposing a substrate in a specific image receiving position within a given plane by projection imaging, said system comprising:

(a) a first, image forming station for supporting a first liquid crystal cell;
(b) a second, image projecting station for supporting a second, image-bearing liquid crystal cell in a first position, said second liquid crystal cell having first alignment indicia forming part of said image, and for supporting a substrate which is to be exposed, said substrate having corresponding second alignment indicia, said image projecting station including
i) means for projecting the image of said first alignment indicia onto said given plane,
ii) a platen having a front surface for supporting said substrate within said given plane and a back surface opposite said front surface,
iii) an arrangement including camera means located on the back surface side of said platen for optically establishing from the back surface side of the platen the positions of the projected image of said first alignment indicia and second alignment indicia with respect to one another, and
iv) means for moving said platen and its supported substrate, if necessary, in order to place said second alignment indicia in substantial alignment with the projected image of said first alignment indicia, and to thereby place said substrate in said image receiving position;
(c) first means for forming an image in said first liquid crystal cell when said first liquid crystal cell which is supported within said first station;
and
(d) second means operating independently of and simultaneously with the operation of said first means for exposing a substrate located at said second position within said second station by directing radiation onto said second liquid crystal cell located at said first position and projecting the image therein onto the substrate located at said second position, said exposure means including exposure control means for controlling the total amount of radiation which is directed onto said substrate from said liquid crystal cell, said exposure control means including means for measuring the amount of incident radiation that falls on the image plane of said substrate from said liquid crystal cell, thereby precisely controlling the amount of radiation to which said substrate is exposed.

6 more elements

A system for exposing a substrate located at a specific image receiving position within a given plane by projection of an image from an image-bearing liquid crystal cell onto the substrate, said image having first alignment indicia, said substrate having corresponding second alignment indicia, said system comprising:

(a) first and second liquid crystal cells;
(b) a first, image forming station;
(c) a second, image projecting station;
(d) movable means for supporting said first liquid crystal cell within said first, image forming station and for supporting said second liquid crystal cell within said second, image projection station,
(e) means for forming said image in the liquid crystal cell which is supported within said first, image forming station, said image forming means including
i) means for erasing a previous image, if any, in the first liquid crystal cell to create an image-free liquid crystal cell, and
ii) means for forming an image in the image-free liquid crystal cell including emitting means for providing a laser beam,
iii) guiding means for moving and positioning said laser beam to scan the liquid crystal cell and form an image therein, and
iv) a computer means for controlling said guiding means in response to image data;
(f) means for placing the substrate within the image projection station at said image receiving position, said placing means including
i) means for projecting the image of said first alignment indicia onto said given plane,
ii) a platen having a front surface for supporting said substrate within said given plane and a back surface opposite said front surface,
iii) an arrangement including camera means located on the back surface side of said platen for optically establishing from the back surface side of the platen the positions of the projected image of said first alignment indicia and second alignment indicia with respect to one another, and
iv) means for moving said platen and its supported substrate, if necessary, in order to place said second alignment indicia in substantial alignment with the projected image of said first alignment indicia, and to thereby place said substrate in said image receiving position;
(g) means operating independently of and simultaneously with the operation of said image forming means for exposing a substrate located at said specific image receiving position within said second station, said exposing means including
i) a controllable source of radiation,
ii) an optical assembly for directing radiation at the image-bearing liquid crystal cell within said second station and projecting the image therein onto the substrate at said image receiving position to expose the substrate, and
iii) exposure control means for controlling the total amount of radiation which is directed onto said substrate, said exposure control means including means for measuring the amount of incident radiation that falls on the given plane of said substrate, and to thereby precisely controlling the amount of radiation to which said substrate is exposed;
and
(h) means for intermittently moving said support means to switch the two liquid crystal cell between the two stations.

17 more elements

Dependencies are inferred from the claim text.