Anti-fuse structures and methods for making same

A method for making an array of anti-fuse structures comprising:

• providing a substrate surface;
• depositing an oxide layer over said substrate surface;
• etching said oxide layer to form therein a plurality of openings which extend down to said substrate surface;
• depositing amorphous silicon into said plurality of openings such that said amorphous silicon generally conforms to the contours of said plurality of openings to provide, within each opening, a recess having sidewall portions and a base portion which meet at an interface;
• and
• forming oxide spacers within said recesses of said amorphous silicon to substantially cover said interface between said sidewall portion and said base portion of each recess.