US 5,117,389 AGranted

Flat-cell read-only-memory integrated circuit

AssigneeMacronix International Co., Ltd.

InventorTom D. H. Yiu

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Abstract

A flat-cell ROM array reduces the number of block select transistors utilized, allows for the layout of straight metal lines, while sharing the metal lines between even and odd banks, and achieves very high density and high performance. Parallel buried diffusion regions are deposited in the substrate. A gate oxide is laid over the substrate. A plurality of polysilicon word lines are laid over the gate oxide perpendicular to the buried diffusion regions, so that the areas between the respective pairs of buried diffusion regions and under the polysilicon word lines, form columns of flat cell field effect transistors. An insulating layer is laid over the polysilicon word lines, and a plurality of metal bit lines and virtual ground lines is deposited. These metal lines are shared by even and odd columns of field effect transistors. Access to the metal lines is made through a plurality of LOCOS block select transistors connected to every other buried diffusion bit line. The alternate buried diffusion bit lines are connected through either a buried diffusion region to its left or a buried diffusion region to its right to the metal lines, by means of bank right and left select transistors.

Claims18

Dependent claims

A memory circuit on a semiconductor substrate;

comprising:
a plurality of buried diffusion regions LBL.sub.k in the substrate, the regions forming lines in a section of the substrate;
an insulating layer of essentially constant thickness over the section of the substrate;
a first plurality of conductive strips WL.sub.m on the insulating layer, the first plurality of conductive strips forming lines intersecting the buried diffusion regions, so that regions between respective pairs of buried diffusion regions and under a conductive strip, form channels of field effect transistors, whereby a column of storage cells is formed between each pair of buried diffusion regions;
a second plurality of conductive strips ML.sub.j isolated from the first plurality, the second plurality of conductive strips forming lines along the plurality of buried diffusion regions;
code implants in the channels of the field effect transistors to define a conductive or a non-conductive state in response to a signal on the corresponding one of the first plurality of conductive strips;
a plurality of block select transistors, each having a drain connected to one of the second plurality of conductive strips ML.sub.j, a source connected to an adjacent one of the plurality of buried diffusion regions LBL.sub.k, a gate connected to receive a block select signal;
wherein alternate buried diffusion regions are connected to the source of respective block select transistors, and further including:
means, coupled to each of said alternate buried diffusion regions LBL.sub.k, for selectively coupling a buried diffusion region LBL.sub.k-1 on one side or a buried diffusion region LBL.sub.k+1 on an other side through said alternate buried diffusion region LBL.sub.k to the source of the respective block select transistor.

6 more elements

A memory circuit on a semiconductor substrate;

comprising:
a plurality of buried diffusion regions in the substrate, the regions forming essentially parallel lines in a section of the substrate;
an insulating layer of essentially constant thickness over the section of the substrate;
a first plurality of conductive strips on the insulating layer, the first plurality of conductive strips forming essentially parallel lines intersecting the buried diffusion regions, so that regions between respective pairs of buried diffusion regions and under a conductive strip, form channels of field effect transistors, whereby a column of field effect transistors is formed between each pair of buried diffusion regions;
a second plurality of conductive strips isolated from the first plurality, the second plurality of conductive strips forming lines along the plurality of buried diffusion regions essentially straight across all of the first plurality of conduction strips in the section;
code implants in the channels of the field effect transistors to define a conductive or a non-conductive state in response to an energizing voltage on the corresponding one of the first plurality of conductive strips;
a plurality of block select transistors, each having a drain connected to one of the second plurality of conductive strips, a source connected to an adjacent one of the buried diffusion regions, a gate connected to receive a block select signal;
and
means, coupled to the plurality of buried diffusion regions, for selectively coupling two columns of field effect transistors to each one of the second plurality of conductive strips in response to select signals.

6 more elements

A memory circuit on a semiconductor substrate;

comprising:
a plurality of local bit lines LBL.sub.n, for n equal to 0 through N-1, each comprising a buried diffusion region in the substrate;
an insulating layer of essentially constant thickness over the local bit lines;
a plurality of word lines WL.sub.m, for m equal to 1 through M, on the insulating layer, the plurality of word lines intersecting the local bit lines, so that regions between respective pairs of local bit lines and under word lines, form channels of field effect transistors, whereby a column of flat cell ROM storage units is formed between each pair of local bit lines;
a plurality of global bit lines isolated from the plurality of word lines, the global bit lines comprising essentially straight conductive strips for a length extending across the plurality of word lines WL.sub.m, for m equal to 1 through M, a first subset of the global bit lines forming data lines and a second subset of the global bit lines forming virtual ground lines;
a block select line;
a first plurality of block select transistor, each having a drain connected to one of the global bit lines forming data lines, a source connected to a respective one of the local bit lines LBL.sub.4k+1, for k equal to 0 through (N-1)/4, and a gate connected to the block select line;
a second plurality of block select transistors, each having a drain connected to one of the global bit lines forming virtual ground lines, a source connected to a respective one of local bit lines LBL.sub.4k+3, for k equal to 0 through (N-1)/4, and a gate connected to the block select line;
and
a bank left select word line and a bank right select word line, on the insulating layer, intersecting the plurality of local bit lines and defining bank left and bank right select transistors between each pair of local bit lines and under the bank left select and bank right select word lines;
wherein
the bank left and bank right select transistors are fixed coded to couple local bit lines LBL.sub.2j, for j equal to 0 through (N-1)/2, to a data line through another local bit line LBL.sub.2j.+-.1 in response to energizing voltage on the bank left select word line, or to couple local bit lines LBL.sub.2j, for j equal to 0 through (N-1)/2, to a virtual ground line through another local bit line LBL.sub.2j.+-.1 in response to energizing voltage on the bank right select word line.

9 more elements

A memory circuit on a semiconductor substrate;

comprising:
a plurality of memory sub-arrays;
means for generating block select signals indicating selected sub-arrays;
wherein at least one of said sub-arrays comprises
a plurality of buried diffusion regions LBL.sub.k, for k equal to 1 through N, in the substrate, the regions forming local bit lines LBL.sub.k in a section of the substrate;
an insulating layer of essentially constant thickness over the section of the substrate;
a first plurality of conductive strips WL.sub.m on the insulating layer, the first plurality of conductive strips forming lines intersecting the buried diffusion regions, so that regions between respective pairs of buried diffusion regions and under a conductive strip, form channels of field effect transistors, whereby a column of storage cells is formed between each pair of buried diffusion regions;
a second plurality of conductive strips ML.sub.j isolated from the first plurality, the second plurality of conductive strips forming lines along the plurality of buried diffusion regions;
code implants in the channels of the field effect transistors to define a conductive or a non-conductive state in response to a signal on the corresponding one of the first plurality of conductive strips;
a first plurality of block select transistors, each having a drain connected to one of the second plurality of conductive strips ML.sub.j, a source connected to an adjacent one of the plurality of buried diffusion regions LBL.sub.2k, for k equal to 1 through N/2, near a first end of the buried diffusion region, a gate connected to receive a block select signal indicating the one sub-array;
and
a second plurality of block select transistors, each having a drain connected to one of the second plurality of conductive strips ML.sub.j, a source connected to an adjacent one of the plurality of buried diffusion regions LBL.sub.2k, for k equal to 1 through N/2, near a second end of the buried diffusion region, a gate connected to receive the block select signal indicating the one sub-array;
wherein alternate buried diffusion regions are connected to the sources of respective block select transistors in the first and second pluralities of block select transistors, and further including;
means, coupled to each of said alternate buried diffusion regions LBL.sub.2k, for selectively coupling a buried diffusion region LBL.sub.2k-1 on one side or a buried diffusion region LBL.sub.2k+1 on an other side through said alternate buried diffusion region LBL.sub.2k to the sources of the respective block select transistors.

11 more elements

Dependencies are inferred from the claim text.