Wafer carrier
AssigneeFluoroware, Inc.
InventorRobert D. Kos
Life of this patent
Estimating the term…
Abstract
A moldable plastic carrier for predictably and steadfastly locating the carrier and wafers therein upon wafer transfer equipment has an open top for insertion and removal of the wafers, a pair of opposed upright sidewalls with inner opposed ribs and wafer pockets therebetween for spacing and supporting the axially aligned wafers in the carrier. The carrier has a pair of opposed upright end walls with one upright end wall being indexable upon the transfer equipment. The one end wall has opposing transfer equipment to contact rails each with upper and lower portions. An arch is formed between the upper and lower portions thereby forming a 4-point contact with the transfer equipment.
Claims13
A molded plastic carrier for wafers, the carrier being indexable upon a flat platform of wafer transfer equipment with indexing webbing on the platform, having an open top for insertion and removal of the wafers, a pair of opposed upright sidewalls with inner opposed ribs and wafer pockets therebetween for spacing and supporting the wafers in axial alignment in the carrier, one upright end wall with a horizontal indexing bar being indexable upon the webbing of the transfer equipment, comprised of opposing, upright transfer equipment contact rails each with upper and lower portions with an arch therebetween formed by an upright ramp along one of the portions of the rails one each rail thereby forming a four point flat contact between the carrier and platform of the transfer equipment.
A molded plastic carrier for wafers, the carrier being indexable upon a flat platform of wafer transfer equipment with indexing webbing on the platform, having an open top for insertion and removal of the wafers, a pair of opposed upright sidewalls with inner opposed ribs and wafer pockets therebetween for spacing and supporting the wafers in axial alignment in the carrier, one upright end wall with a horizontal indexing bar being indexable upon the webbing of the transfer equipment, comprised of opposing, upright transfer equipment contact rails each with upper and lower portions, an end surface;
- inner and outer upright side edges that slope rearwardly from the inner side edge to the outer side edge and a raised ramp projecting from said end surface along the inner side edge beginning at the upper portion and extending downwardly toward the flush with the end surface at said lower portion, thereby forming four points of flat contact between the carrier and the platform of the equipment at the inner side edges of the upper and lower portions.
A molded plastic carrier for wafers, the carrier being indexable upon a flat platform of wafer transfer equipment with indexing webbing on the platform, having an open top for insertion and removal of the wafers, a pair of opposed upright sidewalls with inner opposed ribs and wafer pockets therebetween for spacing and supporting the wafers in axial alignment in the carrier, one upright end wall with a horizontal indexing bar being indexable upon the webbing of the transfer equipment, comprised of opposing transfer equipment contact rails each with upper and lower portions and being substantially flat with an inner side edge sloping rearwardly to an outer side edge and a raised ramp beginning at the upper portion along the inner side edge and extending downward to intermediate of the upper and lower portions thereby forming four points of flat contact between the carrier and the platform of the equipment with two points of contact at the top of the ramps and the other two points of contact at the inner side edge of the lower portions.
Dependencies are inferred from the claim text.