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US 5,106,273 AGranted
Vacuum pump for producing a clean molecular vacuum
AssigneeAlcatel Cit
InventorsGuy Lemarquand, Denis Perrillat-Amede, Didier Pierrejean
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AssigneeAlcatel Cit
InventorsGuy Lemarquand, Denis Perrillat-Amede, Didier Pierrejean
Estimating the term…
A vacuum pump for producing a clean molecular vacuum, the vacuum pump comprising a stator (1A, 1B) and a rotor (2), the rotor being driven by a drive motor (6, 7, 8) integrated in the pump, the rotor being supported by magnetic bearings, and being bell-shaped fitting over an internal projection (3) protruding from the stator, the stator components (7, 8) of the drive motor and of the bearings (11B, 12B, 13B, 15, 16) being situated on the periphery of the internal projection (3), the rotor components (11A, 12A, 13A, 14) of the drive motor and of the bearings being situated on the internal periphery of the bell-shaped rotor (2), the vacuum pump being characterized in that a first gastight coating (29) made of non-magnetic material covers the projection (3) overlying the stator components of the motor and of the bearings, and in that similarly in the rotor a second gastight coating (30) made of non-magnetic material covers the rotor components of the drive motor and of the bearings.
A vacuum pump for producing a clean molecular vacuum, said vacuum pump comprising a stator (1A, 1B) and a rotor (2), the rotor being driven by a drive motor (6, 7, 8) integrated in the pump, the rotor being supported by magnetic bearings, and being bell-shaped fitting over an internal projection (3) protruding from the stator, the stator components (7, 8) of the drive motor and of said bearings (11B, 12B, 13B, 15, 16) being situated on the periphery of said internal projection (3), the rotor components (11A, 12A, 13A, 14) of the drive motor and of said bearings being situated on the internal periphery of said bell-shaped rotor (2), said vacuum pump being characterized in that a first gastight coating (29) made of non-magnetic material covers said projection (3) overlying said stator components of the motor and of the bearings, and in that similarly in the rotor a second gastight coating (30) made of non-magnetic material covers said rotor components of the drive motor and of said bearings.
Dependencies are inferred from the claim text.