Method of forming a corrosion-resistant protective coating on aluminum substrate
AssigneeApplied Materials, Inc.
InventorsD'Arcy H. Lorimer, Craig A. Bercaw
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AssigneeApplied Materials, Inc.
InventorsD'Arcy H. Lorimer, Craig A. Bercaw
Estimating the term…
A corrosion-resistant protective coating on an aluminum substrate capable of withstanding corrosion attack by process halogen gases and plasmas is disclosed. The protective coating is formed by contacting an aluminum oxide layer on an aluminum substrate with one or more fluorine-containing gases at an elevated temperature. In a preferred embodiment, a high purity corrosion-resistant protective coating on an aluminum substrate capable of withstanding corrosion attack may be formed by first forming a high purity aluminum oxide layer on the aluminum substrate and then contacting the aluminum oxide layer with one or more high purity fluorine-containing gases at an elevated temperature to form the high purity corrosion resistant protective coating theron.
A method of forming a corrosion-resistant protective coating on an aluminum substrate which comprises contacting an aluminum oxide layer on said aluminum substrate with one or more fluorine-containing gases at an elevated temperature.
A method of forming a corrosion-resistant protective coating on an aluminum substrate which comprises:
A method of forming a high purity corrosion-resistant protective coating on an aluminum substrate which comprises contacting a high purity aluminum oxide layer on said aluminum substrate with one or more high purity fluorine-containing gases at an elevated temperature to form said high purity corrosion resistant protective coating thereon.
A method of forming on an aluminum substrate a corrosion-resistant protective coating containing less than about 3 wt.% of elements other than aluminum, hydrogen, oxygen, and fluorine which comprises:
Dependencies are inferred from the claim text.