Epitaxial reactor having a wall which is protected from deposits
AssigneeU.S. Philips Corporation
InventorPeter Frijlink
Life of this patent
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Abstract
An epitaxial growth reactor for processing wafers (1) of a semiconductor material by exposing it to a reactive gas flow. A wall (8) positioned at a slight distance from the wafer or group of wafers which is exposed to the reactive gas in a double wall, with a very narrow space (34) between the two walls, and this space is filled with a mixture whose composition can be varied and, consequently, the thermal conductivity can be adjusted. The mixture used is a hydrogen/argon mixture, the proportion of each of these gasses in the mixture being adjustable. The interior wall (8) of the double wall is a quartz plate and the exterior wall (9) is made of metal. Relevant FIG.: 1.
Claims8
An epitaxial growth reactor for processing at least one semiconductor wafer by exposing said wafer to a flow of a reactive gas while said wafer is being heated and gives off heat, said reactor comprising a side wall portion, a cover wall portion, means for supporting said wafer, means for providing said wafer with said flow of reactive gas and means for heating said gas, at least one of said side wall portion or said cover wall portion comprising an interior wall portion positioned at a small distance from the wafer and facing the wafer, an exterior wall portion positioned at a small distance from said interior wall portion, wherein a hollow space is defined between said interior wall portion and said exterior wall portion, which hollow space is provided with a fluid mixture, and including means to adjust the composition of the fluid mixture during said processing in order to adjust the wall conductivity and which space is sufficiently narrow to allow heat to be drawn off from it, through the fluid mixture substantially by conduction rather than by convection said mixture thereby providing means for controlling the thermal conductivity of said wall portion.
Dependencies are inferred from the claim text.