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US 5,022,619 AGranted
Positioning device of table for semiconductor wafers
AssigneeTokyo Aircraft Instrument Co., Ltd.
InventorSakae Mamada
Life of this patent
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Abstract
A positioning device for a table on which a semiconductor wafer is moved into an inspection position is described. It comprises a pneumatic stage supporting the table and movable both in the x and y directions, a moving device using wire which moves the stage in the x or y direction, and a fine resolution lifting device which moves or lifts the table vertically.
Claims3
A positioning device for a table movable in three mutually orthogonal directions, on which a semiconductor wafer is disposed at an inspection position comprising:
- pneumeatic stage supporting means for supporting the table, said stage supporting means being movable in a first and second of the three directions;
- wire moving means for moving the stage supporting means in the first and second direction;
- and
- fine resolution lifting means for moving the table in a third of the three directions;
- wherein said pneumatic stage supporting means comprises:
- a bed plate;
- a first frame including two guide plates for guiding the pneumatic stage supporting means in the first direction;
- a second frame having two guide plates and slides which inject air against the guide plates of the first frame from the sides and against the bed plate vertically from above, respectively;
- and
- a moving stage having slides which inject air against the guide plates of the second frame from the sides and against the bed plate vertically from above, respectively.
7 more elements
Dependencies are inferred from the claim text.