Mask and method for making gradient sputtered coatings
AssigneePPG Industries, Inc.
InventorsDanny L. Woodward, Chester Thrasher
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Abstract
Sputtered coatings of gradient thicknesses are produced by employing a foraminous mask between the cathode and the substrate. The size of openings in the foraminous mask may be varied in different areas to provide versatility in controlling the gradient patterns. The invention is particularly suitable for producing gradient electroconductive heating films on transparencies.
Claims13
Apparatus for sputter coating a substrate with a coating having gradations in thickness comprising a sputtering target electrode, substrate support means adapted to support a substrate to be coated in facing relationship to the target electrode, the substrate being substantially larger in area than the target electrode, the target electrode and the substrate support having means associated therewith for providing reciprocating relative motion therebetween, a foraminous mask member having a large number of apertures between the target electrode and at least a portion of the substrate and spaced therefrom a distance sufficient to partially block deposition of sputtered material from the electrode onto said at least a portion of the substrate.
The apparatus of claim I wherein the foraminous mask includes screen material.
A method of sputter coating a substrate with a coating having gradations in thickness wherein a coating is sputtered from a target electrode onto the substrate which is of substantially larger area than the target electrode, reciprocating relative motion is provided between the substrate and the target electrode during sputtering, and the deposition of the coating onto at least a portion of the substrate is partially masked by means of a foraminous mask having a large number of apertures interposed between the electrode and said at least portion of the substrate and spaced therefrom a sufficient distance to produce gradations in the coating thickness.
Dependencies are inferred from the claim text.