Rotation supporting device of a polygon mirror
AssigneeEbara Corporation
InventorsNoriyuki Osada, Yasushi Hisabe, Toshihiro Ohtani, Toshiya Kanamori
Life of this patent
Estimating the term…
Loading patent…
AssigneeEbara Corporation
InventorsNoriyuki Osada, Yasushi Hisabe, Toshihiro Ohtani, Toshiya Kanamori
Estimating the term…
A rotation supporting device of a polygon mirror comprising a stationary shaft provided with a shaft sleeve around its circumference, a rotary assembly rotatably mounted around the circumference of the shaft sleeve and having a radial circumferential surface of a polygon made to serve as mirror surfaces and having a magnet member, thrust plates for suppressing the motion of a rotary assembly in the axial direction. The rotary assembly comprises a first rotor rotatably mounted at the outer circumference of the shaft sleeve, a second rotor having a circumferential surface of a polygon made to serve as mirror surfaces and being disposed at the outer circumference of the first rotor, and a yoke secured on the outer circumference of the first rotor. The first rotor is made of a ceramic material, the second rotor is made of aluminum and the yoke is made of steel. Radial dynamic pressure bearing is included between the outer circumference of the shaft sleeve and the rotary assembly. Dynamic thrust pressure bearings are included between the end surfaces of a rotary assembly and the thrust plates.
A rotation supporting device of a polygon mirror, comprising:
A rotation supporting device of a polygon mirror, comprising:
A rotation supporting device of a polygon mirror, comprising:
A rotation supporting device of a polygon mirror, comprising:
Dependencies are inferred from the claim text.