Defect-recognition processing apparatus
AssigneeKabushiki Kaisha Toshiba
InventorsToshiro Usami, Hiroyuki Kamijo, Takao Ohta, Masanobu Ogino
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Abstract
A defect-recognition processing apparatus converts into a defect image pattern, via a television camera, crystal defects present on the surface of an object under inspection, to process an image signal, by means of an image processing device, which corresponds to the defect image pattern, to measure rectangular images in terms of their length and their ratio between L.sub.Y and L.sub.X (L.sub.Y : a length in a longitudinal direction and L.sub.X : a length in the lateral direction of the wafer) and to detect defects developed on the surface of the aforementioned object.
Claims14
A defect-recognition processing apparatus comprising:
- image converting means for converting, into an image, surface data corresponding to a predetermined area on a surface of an object being inspected;
- image processing means for processing the image from said image converting means and for detecting the presence of a defect image having both a length greater than a predetermined value and a ratio L.sub.y /L.sub.X having a value greater than n or a value lower than 1/n where L.sub.Y denotes a length of the defect image in a longitudinal direction and L.sub.X denotes a length of the defect image in a lateral direction;
- and
- system control means for controlling operations performed by said image processing means.
Dependencies are inferred from the claim text.