Method of processing an article in a supercritical atmosphere

A method of forming a patterned surface layer on a substrate, said method comprising the steps of:

• forming an unpatterned surface layer on said substrate;
• forming a patterned resist film on said unpatterned surface layer;
• selectively removing said unpatterned surfaced layer through said patterned resist film to form said patterned surface layer;
• introducing said patterned resist film into a supercritical atmosphere together with said substrate having said patterned surface layer;
• and
• removing said patterned resist film from said patterned surface layer within said supercritical atmosphere.

A method of washing a patterned surface layer on a substrate within a pressure vessel, said pressure vessel being kept at an initial temperature lower than a predetermined temperature corresponding to the critical temperature of a fluid of a predetermined volume which is supplied to said pressure vessel, said method comprising the steps of:

• positioning said patterned surface layer together with said substrate within said pressure vessel;
• supplying said pressure vessel with said fluid;
• raising the temperature of said pressure vessel to a prescribed temperature higher than said critical temperature to thereby convert said fluid into a supercritical state;
• and
• maintaining said prescribed temperature for a predetermined duration of time to wash said patterned surface layer within said supercritical fluid.

A method of washing an article within a pressure vessel, said pressure vessel being kept at an initial temperature lower than a predetermined temperature corresponding to a critical temperature of a fluid of a predetermined volume which is supplied to said pressure vessel, said method comprising the steps of:

• positioning said article within said pressure vessel;
• supplying said pressure vessel with said fluid;
• raising the temperature of said pressure vessel to a prescribed temperature higher than said critical temperature to thereby convert said fluid into a supercritical state;
• and
• maintaining said prescribed temperature for a predetermined duration of time to wash said article within said supercritical fluid.