Electrostatic micromotor

An electrostatic machine comprising:

• a stator formed by surface micromachining sacrificial layers on a substrate surface;
• a plate formed by the surface micromachining that formed the stator on the substrate surface and positioned for movement relative to the stator free of contact thereto and with a gaseous gap between the stator and plate, the distance across the gap between the stator and plate being short enough and facing surfaces of the stator and plate across the gap being smooth enough to support a field strength above about 10.sup.8 V/m without electrostatic breakdown, the facing surfaces of the stator and plate being free of contact with each other across the gap, and the gap having a pressure-spacing of less than about 5.times.10.sup.-3 bar mm;
• and
• means for generating and sustaining an electrostatic field across the gaseous gap between the stator and plate.

An electrostatic machine comprising:

• a stator formed on a substrate surface;
• a plate positioned for movement relative to the stator in a manner free of contact thereto and with a gaseous gap between the stator and plate, the plate formed during the forming of the stator, the distance across the gap between the stator and plate being short enough and surfaces of the stator and plate facing each other across the gap being smooth enough to support a field strength above about 10.sup.8 V/m without breakdown, the surfaces of the plate and stator facing each other across the gap being free of contact with each other, and the gap having a pressure-spacing less than about 5.times.10.sup.-3 bar mm;
• and
• means for generating an electrostatic field across the gap between the stator and plate such that the plate is elevated above the substrate surface and moved laterally while being elevated.