A method of manufacturing a thermo-sensitive resistor
AssigneeNGK Insulators, Ltd.
InventorYasuhito Yajima
Life of this patent
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Abstract
A thermo-sensitive resistor including an electrically insulating substrate, a thin-film heating resistor formed on the substrate and lead wires electrically connected to the thin-film heating resistor, wherein the resistance of the thin-film heating resistor is adjusted by increasing or decreasing a film thickness of a previously formed base thin-film heating resistor by means of an electroplating method or an electroless plating method, and thus the area for heating of the thermo-sensitive resistor can remain constant even if the resistance adjustment is performed.
Claims16
A method of manufacturing a thermo-sensitive resistor comprising:
- providing a cylindrical or plate shape electrically insulating substrate;
- forming an initial thin-film heating resistor on a surface of said substrate;
- adjusting the resistance of said initial thin-film heating resistor to form a final thin-film heating resistor, said adjusting being performed by increasing or decreasing a film thickness of said initial thin-film heating resistor by means of an electroplating method or an electroless plating method without changing a width of said initial thin-film heating resistor;
- and
- electrically connecting lead wires to said thin-film heating resistor, said lead wires being used to electrically connect said resistor with external elements and to mechanically support said thermo-sensitive rsistor.
A method of manufacturing a thermo-sensitive resistor comprising:
- providing a cylindrical or plate shape electrically insulating substrate;
- forming a photoresist on an outer surface of said insulating substrate;
- depositing a thin-film heating resistor layer on the outer surface of said insulating substrate and on a surface of said photoresist;
- burning out said photoresist to form an initial thin-film heating resistor having a desired shape;
- connecting lead wires electrically to said initial thin-film heating resistor and mechanically to said insulating substrate via a conductive paste to form an assembly;
- heating said assembly;
- adjusting the resistance of said initial thin-film heating resistor to form a final thin-film heating resistor, said adjusting being performed by increasing or decreasing a film thickness of said initial thin-film heating resistor by means of an electroplating method or an electroless plating method without changing a width of said initial thin-film heating resistor;
- and
- reheating said assembly.
A method of manufacturing a thermo-sensitive resistor comprising:
- providing a cylindrical or plate shape electrically insulating substrate;
- forming an initial thin-film heating resistor on a surface of said substrate;
- electrically connecting lead wires to said thin-film heating resistor, said lead wires being used to electrically connect said resistor with external elements and to mechanically support said thermo-sensitive resistor;
- and
- adjusting the resistance of said initial thin-film heating resistor, while said resistance is continuously monitored through said lead wires, to form a final thin-film heating resistor, said adjusting being performed by increasing or decreasing a film thickness of said initial thin-film heating resistor by means of an electroplating method or an electroless plating method without changing a width of said initial thin-film heating resistor.
A method of manufacturing a thermo-sensitive resistor comprising:
- providing a cylindrical or plate shape electrically insulating substrate;
- forming a photoresist on an outer surface of said insulating substrate;
- depositing a thin-film heating resistor layer on the outer surface of said insulating substrate and on a surface of said photoresist;
- burning out said photoresist to form an initial thin-film heating resistor having a desired shape;
- connecting lead wires electrically to said initial thin-film heating resistor and mechanically to said insulating substrate via a conductive paste to form an assembly;
- heating said assembly;
- adjusting the resistance of said initial thin-film heating resistor, while said resistance is continuously monitored through said lead wires, to form a final thin-film heating resistor, said adjusting being performed by increasing or decreasing a film thickness of said initial thin-film heating resistor by means of an electroplating method or an electroless plating method without changing a width of said initial thin-film heating resistor;
- and
- reheating said assembly.
Dependencies are inferred from the claim text.