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US 4,918,975 AGranted
Method and apparatus for testing fluid-filled systems for leaks
AssigneeLeybold Aktiengesellschaft
InventorGunter Voss
Life of this patent
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Abstract
The present invention relates to a leak checking method for systems filled with fluids. A test gas, preferably helium, is introduced into the fluid and test gas escaping through any leak in the wall of the system is detected with the aid of a test gas sensitive detector. This method allows highly sensitive and continuous leak checks.
Claims19
A method of determining the presence of a leak in a system containing a fluid, which at least has a liquid phase, comprising:
- exposing a part of the system to be tested to a test gas, passing the fluid past a membrane separator, and sampling for the presence of the test gas that has passed through the membrane separator with the aid of a detector sensitive to the test gas.
An apparatus for detecting a leak in a system filled with a fluid which at least has a liquid phase, comprising:
- a test gas supply means for exposing the system to a test gas;
- a membrane separator means, being permeable to the test gas and impermeable to the fluid, positioned on a portion of the system and in contact with the liquid phase of the fluid flowing through the system;
- and
- a detector means, connected to the membrane separator and external to the system, for sensing the presence of test gas in the system.
1 more element
Dependencies are inferred from the claim text.