US 4,907,534 AGranted

Gas distributor for OMVPE Growth

AssigneeSiemens Aktiengesellschaft

InventorsRong-Ting Huang, Dumrong Kasemset

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Abstract

A new gas distributor 31 provides an extremely uniform gas across a wide cross section distance. An OMVPE reactor equipped with this distributor, a unique low volume quartz insert, a load-locked growth chamber and a low pressure operation scheme provide a reactor system capable of growing extremely uniform GaAs and AlGaAs epilayers across four two-inch wafers or one three to four inch wafer with atomic layer abruptness capablity. The performance of such an OMVPE reactor provides superior morphology and throughout compared to conventional OMVPE reactors with equivalent performance to MBE. Since the gas distributor is capable of distributing an extremely uniform gas across a wide cross-section distance, it can also be employed in other types of OMVPE reactors to improve the material uniformity.

Claims7

Dependent claims

Organometallic vapor phase epitaxy (OMVPE) apparatus for growing epitaxial layers on semiconductor wafers, the apparatus comprising:

a radial gas injection manifold having a plurality of ports for receiving reactant gas and a port for receiving a carrier gas and producing a gas output;
a growth chamber having a confined volume for receiving at least one semiconductor wafer, the growth chamber having a recess for receiving a quartz insert to provide the confined volume, the recess having a plurality of aperatures equally distributed in a bottom portion of the recess;
and
gas distributing means located between the manifold and the growth chamber comprising an expansion chamber connected to receive the gas output at one end and having a plurality of equally distributed ports at another end of the expansion chamber and a plurality of tubes wherein each tube extends from each of the ports to one of the plurality of apertures, and the plurality of tubes have the same length for producing a laminar gas flow inside the quartz insert of the growth chamber.

1 more element

Dependencies are inferred from the claim text.