Universal edged-based wafer alignment apparatus
AssigneeThe Perkin-Elmer Corporation
InventorsDaniel N. Galburt, Jere D. Buckley
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Abstract
An apparatus for aligning a wafer. The edge of a wafer is mapped by means of a photodetector array and a light source to provide a signal representative of the X-Y position and angular orientation of the wafer as the wafer is rotated one revolution on a shaft. The signal is digitized and processed to provide stored information of the X-Y position and angular orientation of the wafer. The shaft is then rotated to move the wafer from its calculated angular orientation to a desired angular orientation. The X-Y positional information may be used to center the wafer.
Claims5
A universal wafer prealigner comprising:
- a shaft;
- first means for securing a wafer eccentrically to one end of said shaft, said wafer having a flat;
- second means for rotating said shaft,
- light sensor means, on one side of said wafer, for sensing the shadow of the edge of said wafer;
- single light source means, on the other side of said wafer, for directing a single light beam parallel to the axis of rotation of said wafer partially on one side of said wafer and partially on said light sensor;
- said light sensor means having a linear dimension sufficiently long to capture the shadow of said edge of said wafer;
- said light sensor means providing an output signal as said second means rotates said shaft, said output signal being indicative of the angular position of said flat, the degree of eccentricity of said wafer with respect to said shaft, and the angular relationship between said flat and the eccentricity of said wafer with respect to said shaft;
- said shaft including resolver means, connected to the other end thereof, for providing signals representative of the angular position of said shaft at predetermined increments;
- computer means for storing data representative of a desired X-Y and angular positions of said wafer;
- means connecting said signals from said resolver means and said sensor means to said computer means, for calculating deviation of said wafer from said desired X-Y and angular positions of said wafer;
- motor drive means, connected between said computer means and said second means, for positioning said wafer to said desired angular position.
A method of aligning a wafer comprising the steps of:
- placing a wafer eccentrically on a shaft;
- rotating said shaft;
- directing a single light beam substantially parallel to the axis of rotation of said shaft partially illuminating the edge of said wafer;
- detecting the portion of said light beam not illuminating said wafer over a period of at least one revolution of said shaft;
- generating signals representative of the motion of said wafer;
- and
- calculating the x-y and angular position of said wafer from said signals.
Dependencies are inferred from the claim text.