Monolithic series-shunt diode switch
AssigneeAlpha Industries, Inc.
InventorsHenri R. Chalifour, Clifford A. Levi
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Abstract
A switching circuit comprising a substrate of semiconductor material, a first switching device (e.g., a diode) formed in a first region of the substrate, a second switching device (e.g., a diode) formed in a second region of the substrate integral with the first region, the second switching device being electrically coupled to the first switching device, and means, disposed in the substrate, for electrically isolating the first substrate region from the second substrate region.
Claims26
A switching circuit comprising
- a substrate of semiconductor material,
- a first switching device formed in a first region of said substrate,
- a second switching device formed in a second region of said substrate integral with said first region, said second switching device being electrically coupled to said first switching device, and
- means, disposed in said substrate, for electrically isolating said first substrate region from said second substrate region,
- wherein said first and second substrate regions are disposed adjacent one another, said isolating means comprising a first region of dielectric material disposed in a first cavity formed in said substrate between said first and second substrate regions.
A switching circuit comprising
- a substrate of semiconductor material,
- a first diode formed in a first region of said substrate,
- a second diode formed in a second region of said substrate adjacent to and integral with said first region, said second diode being coupled to said first diode, and
- a dielectric region disposed in said substrate between said first and second regions, for electrically isolating said first region from said second region.
A method of fabricating a switching circuit comprising the steps of
- providing a substrate of semiconductor material,
- forming a first switching device in a first region of said substrate,
- forming a second switching device in a second region of said substrate integral with said first region,
- dielectrically isolating said first region from said second region, and
- electrically coupling the first switching device to the second switching device.
Dependencies are inferred from the claim text.